本論文首次提出振動頻率匹配(Vibration Frequency Matching)之光纖干涉儀作為微懸臂樑之共振頻率飄移之量測工具，乃是以光纖作為基礎架構之麥克森干涉儀，干涉儀的參考端以及樣品端之反射鏡面皆為可動，鏡面之振動頻率由壓電材料所激發，此方法可運用作為高精密度的頻率量測工具。
本文中討論微懸臂樑尺寸設計、模擬、材料選用及製程設計討論，在厚度0.15□m、長度25□m及寬度7-5□m的單晶矽微懸臂樑，可以達到次飛克等級的質量解析度。而將微懸臂樑底部基材掏空可以提高懸臂樑品質因素，減低誤差值。
運用本系統檢測樣品附著在微懸臂樑的共振頻率以得知樣品之質量，所測試之樣品包含口腔黏膜細胞、大腸桿菌、酵母菌、藍綠藻及前端帶有螢光的E. Coli detection probe ( oligonucleotide probe)。本系統量得口腔黏膜細胞質量為12.2ng、大腸桿菌質量為0.47ng、酵母菌質量為25pg、E. Coli detection probe質量為 575.4fg。使用VFM系統搭配微懸臂樑做質量檢測的質量解析度約在57fg。

This thesis demonstrated a low cost cantilever-based mass sensor with high resolution for cell mass using a fiber-based interferometer system. The mass attached to the cantilever can be measured based on spring-mass theory of a cantilever beam. The quality factor of the beam used is high enough (Q~1000) that the nature frequency shift of the cantilever could be precisely characterized. The minimum mass detected is about 575.4fg and the cantilever weighs 28.6ng. The ratio of the cantilever to the minimum is about 20ppm. The mass resolution in this system is around 57fg. The mass detection is based on Vibration Frequency Matching (VFM) method used in a fiber interferometer that is proposed to measure the difference between sample and reference vibration frequency. The concept of VFM is transforming the difference of vibration frequencies to a time dependent signals. This system’s frequency resolution is 0.15 Hz at 150 kHz.

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