本研究以目前實驗室建立之振鏡式雙光子微影系統進行研究，針對以振鏡系統進行大面積結構加工時之限制提出拼接模式外的解決方法，同時透過加入以及調整系統中各項元件以實現本研究提出之新加工模式，藉此提升振鏡式系統之加工效率及製程彈性。
本研究擬整合振鏡系統與精密位移平台，以兩元件同動的方式解除振鏡系統掃描範圍之限制，也避免拼接方法可能產生之拼接痕跡及拼接誤差，並期望同時提升整體加工效率。另外也將透過雷射功率的快速調變，實現於加工過程中變換體素(Voxel)大小，增加此系統的參數設計彈性。最後將整合各種可使用之加工模式並以提升雙光子微影系統之加工效率及製程彈性為目標建立一複合式振鏡系統。
最終本研究完成此複合式系統架設並以一大面積微鏡陣列證實此複合式系統之可行性，也期望此複合式振鏡系統能為雙光子微影技術帶來更多可能性。

This research is based on a self-built two-photon lithography galvanometer scanning system in laboratory. The main purpose is to bring up another possible solution for manufacturing large area microstructures with galvanometer scanning systems besides common step and scan method. Several new components are also integrated into the current equipment system to accomplish the new manufacturing method and to improve overall efficiency and flexibility.
This research is integrating galvanometer scanning system with positioning stages to remove the limitation of scanning range, so as to avoid the possible stitching lines or errors under step and scan method. On the other hand, in order to improve the manufacturing flexibility of system, we will also realize fast laser power control to build the microstructure with various sizes of voxels. At the end, all available manufacturing methods will be built into one complex scanner system
At the end, a complex scanner system is built and verified with a large area micro-lens array. This study is able to bring more flexibilities and possibilities for two-photon lithography systems.

[1]C. Xiong et al., “Optical Fiber Integrated Functional Micro-/Nanostructure Induced by Two-Photon Polymerization,” Frontiers in Materials, vol. 7, 2020.
[2]S. Maruo, K. Ikuta, and H. Korogi, “Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography,” Journal of Microelectromechanical Systems, vol. 12, no. 5, pp. 533-539, Oct, 2003.
[3]A. Barbot et al., “Microfluidics at Fiber Tip for Nanoliter Delivery and Sampling,” Adv Sci (Weinh), vol. 8, no. 10, pp. 2004643, May, 2021.
[4]A. S. Cordeiro et al., “Two-Photon Polymerisation 3D Printing of Microneedle Array Templates with Versatile Designs: Application in the Development of Polymeric Drug Delivery Systems,” Pharm Res, vol. 37, no. 9, pp. 174, Aug 27, 2020.
[5]M. Göppert-Mayer, “Elementary processes with two quantum transitions,” Annalen der Physik, vol. 18, no. 7-8, pp. 466-479, 2009.
[6]W. Kaiser, and C. G. B. Garrett, “Two-Photon Excitation in CaF2:Eu2+,” Physical Review Letters, vol. 7, no. 6, pp. 229-231, 1961.
[7]J. Stampfl, R. Liska, and A. Ovsianikov, Multiphoton lithography: Techniques, materials, and applications, 1 ed.: Wiley-VCH, 2017.
[8]X. Zhou, Y. Hou, and J. Lin, “A review on the processing accuracy of two-photon polymerization,” AIP Advances, vol. 5, no. 3, 2015.
[9]B. W. Smith, "Optical projection lithography," Nanolithography, pp. 1-41, 2014.
[10]K. H. Kim et al., “Laser Scanner Stage Synchronization Method for Ultrafast and Wide Area Fabrication,” Advanced Materials Research, vol. 383-390, pp. 6277-6282, 2011.
[11]X. Xu et al., “Laser processing system development of large area and high precision,” in Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 2013.
[12]H. Park et al., “Development of a complex laser processing system for cutting and drilling,” in Laser-based Micro- and Nanoprocessing XIV, 2020.
[13]L. Petitgirard, “Nicolas Minorsky (1885-1970) and the mathematics for naval engineering, control theory and nonlinear oscillations,” Revue D Histoire Des Mathematiques, vol. 21, no. 2, pp. 173-216, 2015.
[14]D. I. Kim et al., “Laser output power stabilization for direct laser writing system by using an acousto-optic modulator,” Rev Sci Instrum, vol. 78, no. 10, pp. 103110, Oct, 2007.
[15]Q.-X. Li et al., “High-precision and fast-response laser power stabilization system for cold atom experiments,” AIP Advances, vol. 8, no. 9, 2018.
[16]C.-H. Yeh, “Research and Development of Two Photons Polymerization Scanning System,” Power Mechanical Engineering, National Tsing Hua University, 2020.
[17]C.-Y. Chien, “Research on Optical Path Compensate of 3D Lithography Technology: Galvanometer System to make Grating Structure,” Power Mechanical Engineering, National Tsing Hua University, 2021.
[18]C.-H. Chen, “Research and Development of Two-Photon Polymerization 3D Nano/Micro-Machining System,” Power Mechanical Engineering, National Tsing Hua University, 2015.
[19]C.-W. Yeh, “Research and Development of Two-Photon Polymerization 3D Nano/Micro-Machining System,” Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 2017.
[20]H.-Y. Ni, “Fabrication of Micro Optical Elements Array by Nano
3D Lithography System,” Department of
Power Mechanical Engineering, National Tsing Hua University, 2019.