壓電致動器由於其固有的非線性磁滯和潛變特性，大大降低其定位精準度，若能建立包含磁滯與潛變特性之模型，將之應用於控制系統中則可提升其定位精準度。本論文將利用基本的物理元件，如彈簧、阻尼和庫倫摩擦力等，來建構可完整描述壓電致動器磁滯效應與潛變效應之模型，並設計程序化的參數鑑別步驟以鑑別模型元件參數。而模型中包含了非線性彈簧和動態阻尼，分別模擬磁滯迴圈的非反對稱性，和磁滯迴圈隨輸入頻率改變的特性。此外模型也能有效的解釋殘餘留應力和電荷對壓電致動器造成的影響。利用上述模型可推導出壓電致動器逆模型作為定位控制之用。經由實驗證實透過開迴路逆模型控制的補償，與將壓電致動器視為單一線性彈簧進行開迴路控制結果比較，弦波軌跡之定位誤差由13.77%降低至1.19%以下，步階軌跡之穩態誤差由6.41%降低至0.79%以下，階梯狀軌跡之定位誤差由7.19%降低至0.75%以下。

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