鋯鈦酸鉛（PZT）薄膜應用中，矽基板與白金矽基板是最常見的基板選擇，這是由於製程整合度與技術成熟的考量。而為了得到最佳的薄膜特性，則需成長出（100）優選取向之鋯鈦酸鉛鐵電薄膜。一般而言，要在上述兩種基板上得到優選取向的PZT薄膜相當不容易﹔其中對於金屬有機鹽裂解法（MOD）製程而言，更是困難許多。在本實驗中，成功開發出新的緩衝層材料─Ba（Mg1/3Ta2/3）O3　（BMT）。BMT為性質優良的微波介電材料，與PZT同為鈣鈦礦結構，且晶格常數與PZT相同。
本實驗以脈衝雷射剝鍍法在矽基板與白金矽基板上成長具（100）優選取向的BMT薄膜。而PZT薄膜則以金屬有機鹽裂解法鍍在BMT緩衝層上。傳統上，PZT薄膜因為晶格常數的關係，無法直接成長在矽基板上，而在白金矽基板上則易出現微裂紋的問題。然而，藉由BMT緩衝層的幫助，無論是矽基板還是白金矽基板上，皆可得到具有（100）優選取向的PZT薄膜，且緻密度與平整性都相當優量。在本論文中，將探討製程參數對於BMT緩衝層之微結構與結晶取向的關係﹔以及BMT緩衝層對於PZT薄膜微結構與特性之影響。

1.C. P. de Araujo, J. F. Scott and G. W. Taylor, “Ferroelectric Thin Films: Synthesis and Basic Properties”, Gordon and Breach publishers, (1996).
2.S.Kawashima, “Dielectric properties of Ba(Zn1/3Nb1/3)O3 -Ba(Zn1/3Ta2/3)O3 ceramics”, Proc. Ferroelectric. Mater. Appl. Japan, Vol.1, pp. 1455-1463 (1977)
3.S.Nomura et al, “Ba(Mg1/3Ta2/3)O3 ceramics with temperature stable high dielectric constant and low microwave Loss”, Jpn. J. Appl. Phys., Vol. 21[10], pp. 624-626 (1982)
4.F. Galasso et al., “Alkalin earth-tantalum-oxygen phases including the crystal structure of an ordered perovskite compound, Ba3SrTa2O9”, J.Am.Chem., Soc., Vol. 83, pp. 2830-2832 (1960)
5.F. Nomura et al., “Ordering in compounds of the A(B0.33Ta0.67)O3 type”, Inorg. Chem., Vol. 2[3], pp. 482-484 (1963)
6.R. K. Singh, O. W. Holland and J. Narajan, “Theoretical model for deposition of superconducting thin films using pulsed laser Evaporation Technique”, J. Appl. Phys., 68(1), pp. 275. (1990)
7.A. Richter, “Characteristic features of laser-produced plasmas for thin film deposition”, Thin Solid Films, Vol. 188, pp. 275 (1990),
8.H.J. Scheibe, A. A. Gorbunov, G. K. Baranova, N. V. Klassen, and V. I. Konov, “Thin film deposition by excimer laser evaporation”, Vol. 189, pp. 283 (1990)
9.A. D. Zweig, “A thermo-mechanical model for laser ablation”, J. Appll. Phys., Vol. 70(3), pp. 1684 (1991)
10.R. K. Singh, D. Bhattacharya and j. Narajan, “Laser-target interations and its effect on suface morphology of laser deposited thin films”, Mat. Tes. Sox. Symp. Proc., Vol. 201, pp. 437 (1991)
11.A. Okano and A. Y. Matsuura, “A model of laser ablation in nonmetallic inorganic solids”, J. Appl. Phys., Vol. 73(7), pp. 3158 (1993)
12.M. A. Kadar-Kallen and K. D. bonin, “Focusing of particle beams using two stage laser ablation”, Appl. Phys. Lett., Vol. 54(23), pp. 2296 (1989)
13.S. A. Darke and K. F. Tyson, “Interaction of laser radiation with solid materials and its significance to analytical spectrometry- A review ”, J. Analy. Atom. Spect., Vol.8, pp. 145 (1993)
14.X. D. Wu, A. Inam, “Pulsed laser deposition of high Tc superconduction thin films-present and future”, Mat. Res. Soc Symp. Proc., Vol. 191, pp. 129 (1990)
15.L. Lynds and B. R. Weinberger, “Pulsed laser ablation as a source of energetic reactants: Synthesis of superconductin high to thin films”, Mat. Res. Soc. Symp. Proc., Vol 191, pp. 3 (1990)
16.U. J. Gibson, “Nd:YAG laser ablation of BaTiO3 thin films”, Mat. Res. Soc Symp. Proc., Vol. 191, pp.19 (1990)
17.R. K. Singh, D. Bhattacharya and J. Narayan, “Control of surface particle density in pulsed laser deposition of superconducting TBCO and diamond-like carbon thin films”, Appl. Phys. Lett., Vol. 61(4), pp.843 (1992)
18.K. Murakami, “Dynamics of laser ablation of high Tc superconductors and semiconductors, and a new method for growth of films”, European Mat. Res. Soc. Mono., Vol. 4, pp.125 (1992)
19.K. Nashimoto and D. K. Fork, “Epitaxial growth of MgO on GaAs (001) for growing BaTiO3 thin films by pulsed laser deposition”, Appll. Phys. Lett., Vol. 60(10), pp.1199 (1992)
20.J. Lee and L. Jonson, “Effects of crystalline quality and electrode material on fatigue in PZT thin film capacitors”, Appl. Phys. Lett., Vol. 63(1), pp. 27 (1993)
21.C. Feldman, “BaTiO3 Piezoelectric Thin Film by Flash Evaporation method”, Rev. Sci, Instr., Vol. 26, pp. 463 (1955)
22.R. W. Vest,“Metallo-Organic Decomposition (MOD) Processing of Ferroelectric and Electroptic Films: A Review”, Ferroelectrics, Vol. 102, pp. 53-68 (1990)
23.S. H. Kim, Y. S. Choi, and C. E. Kim, “Preparation of Pb(Zr0.52Ti0.48)O3 thin films on Pt/RuO2 double electrode by a new sol-gel route”, J. Mater. Res., Vol. 12(6), pp. 1576-1581 (1997)
24.陳三元，“強介電薄膜之液相化學法製作”，工業材料 108 期，p.100
25.Y. Xu, “Ferroelectric Materials and Their Appllications”, North Holland, Netherlands, pp. 1-36. (1991)