研究生: |
蕭博仁 |
---|---|
論文名稱: |
應用於藍光DVD讀取頭之靜電力可調式微複合型非球面透鏡之設計與研製 Design and fabrication of Micro Hybrid Aspheric lens for Blue ray DVD shaped by electrostatic force |
指導教授: | 曾繁根 |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
原子科學院 - 工程與系統科學系 Department of Engineering and System Science |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 中文 |
論文頁數: | 116 |
中文關鍵詞: | 藍光DVD 、靜電力 、微型非球面透鏡 |
相關次數: | 點閱:2 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
一般商用藍光DVD非球面透鏡之設計,皆為單顆雙面非球面;在兩面都可以提供聚焦強度的情況下可減少工作距離;另一面利用雙面非球面減少因為大曲率而造成之球面像差,而縮小光點,以增加儲存的容量。然而欲製作高NA值之塑膠高階非球面透鏡,在折射率不高的情況下,需製作大曲率以及高階非球面以達到藍光DVD規格。曲率變化過大之曲面將使得塑膠射出成型脫膜困難,而造成量率太低。欲利用玻璃之高折射率特性製作高NA值非球面透鏡,在精密研磨上也有車銷精度等問題。
本文藉由匹配高分子材料於光學玻璃基板上之折射率差異,輔以2維靜電力可調式電極製作複合式微型藍光非球面透鏡。在論文中先模擬高分子材料SU8-3050與不同玻璃基板之親疏水特性與折射率匹配,得到最佳化參數後,藉由微量滴管滴定所需之最佳化體積,再利用親疏水自我定位與平行板電極之特殊電極調變設計,而得到曲率變化極大之複合型高階非球面透鏡。藉由縮小光點、工作距離,以增加藍光DVD之儲存容量。文中將針對調變電極、液體體積、Spacer間距等參數對藍光非球面透鏡曲線造成之影響做光學分析。
1. E. Bob,“Making MicroLens Backlights Grow Up”,Information Display 5&6/01,SID,P42~45,2001。
2. K. Sunghoon,L. P. Lee,“Stacked Two Dimensional Micro-Lens Scanner for Micro Confocal Imaging Array”,IEEE,P483~486,2002。
3. M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov,“Simple reflow technique for fabrication of a microlens array in solgel glass”, Optics Letters,Vol. 28, No. 9,2003。
4. H. Yang,C. K. Chao,C. P. Lin,S. C. Shen,“Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers”, Journal of Micromechanics and Microengineering,P277~282,2004。
5. M. G. Han,Y. J. Park,S.H. Kim,B. S. Yoo,H. H. Park,“Thermal and chemical stability of reflowed-photoresist microlenses”, Journal of Micromechanics and Microengineering,P398~402,2004。
6. C. K. Chung,Y. Z. Hong,“Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments”,Microsystem Technologies,P525~530,2007。
7. H. Yang,C. K. Chao,T. H. Lin,C. P. Lin,“Fabrication of microlens array with graduated sags using UV proximity printing method”, Microsystem Technologies,P82~90,2005。
8. Tsung-Hung Lin,Hsiharng Yang,Ching-Kong Chao,“Concave microlens array mold fabrication in photoresist using UV proximity printing”,Microsystem Technologies,P1537~1543,2007。
9. Sung-Keun Lee1, Kwang-Cheol Lee and Seung S Lee,“A simple method for microlens fabrication by the modified LIGA process”, Journal of Micromechanics and Microengineering,P334~340,2002。
10. R. F. Yang,H. Yang,“A promising thermal pressing used in fabricating microlens array”,Int. Journal Advance Manufactory Technology,2007。
11. R. F. Shyu,H. Yang,“Vacuum suction aid for microlens array formation using LIGA-like process”,Int. Journal Advance Manufactory Technologies,P518~523,2006。
12. H. Yang,R. F. Shyu,J. W. Huang,“New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems”,Microsystem Technologies,P907~912,2006。
13. B. K. Lee,D. S. Kim,T. H. Kwon,“Replication of microlens arrays by injection molding”, Microsystem Technologies 10,P531~535,2004。
14. M. Heckele,W. Bacher,K. D. Muller,“Hot embossing - The molding technique for plastic microstructures”, Microsystem Technologies 4,P122~124,1998。
15. H. Becker,U. Heim,“Hot embossing as a method for the fabrication of polymer high aspect ratio structures”, Sensors and Actuators 83,P130~135,2000。
16. C. Y. Chang A S. Y. Yang A J. L. Sheh,“A roller embossing process for rapid fabrication of microlens arrays on glass substrates”, Microsystem Technologies12,P754~759,2006。
17. Y. C. Lee,C. Y. Wu,“Excimer laser micromachining of aspheric microlenses with precise surface profile control and optimal focusing capability”, Optics and Lasers in Engineering 45,P116~125,2007。
18. D. W. de Lima Monteiro,O. Akhzar-Mehr, P. M. Sarro and G. Vdovin,“Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si”, OPTICS EXPRESS,P2244~2252, Vol. 11, No. 18,2003。
19. H. Jiang,X. Yuan,Z. Yun,Y. C. Chan,Y. L. Lam,“Fabrication of microlens in photosensitive hybrid sol–gel films using a gray scale mask”, Materials Science and Engineering C 16,P99~102,2001。
20. W. Yu,X. C. Yuan,“UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask”, OPTICS EXPRESS,Vol. 11, No. 18,P2253~2258,2003。
21. N. Chronis,G. L. Liu,K. H. Jeong,L. P. Lee,“Tunable liquid-filled microlens array integrated with microfluidic network”, OPTICS EXPRESS,Vol. 11, No. 19,P2370~2378,2003。
22. H. Ren,D. Fox,P. Andrew,B. Wu,S. T. Wu,“Tunable-focus liquid lens controlled using a servo motor”, OPTICS EXPRESS,Vol. 14, No. 18,P8031~8036,2006。
23. C. C. Cheng,C. A. Chang,C. H. Liu,J. A. Yeh,“A tunable liquid-crystal microlens with hybrid alignment”,Institute of Physics Publishing,Journal of Optic A,S365~369,2006。
24. C. C. Cheng,J. A. Yeh,“Dielectrically actuated liquid lens”, OPTICS EXPRESS,Vol. 15, No. 12,P7140~7150,2007。
25. S. Kuiper,B. H. W. Hendriks,“Variable-focus liquid lens for miniature cameras”, APPLIED PHYSICS LETTERS,Vol.85,P1128~91130,2004
26. C. C. Cheng,C. A. Chang,J. A. Yeh,“Variable focus dielectric liquid droplet lens”, OPTICS EXPRESS,Vol. 14, No. 9,P4101~4106,2006。
27. K. Manoh, H. Yoshida,T. Kobayashi, M. Takase,K. Yamauchii, S. Fuchiwha,T. Ohno,N. Nishi, M. Ozawa,M. Ikeda,T. Tojyo,T. Taniguchi,“Small Integrated Optical Head Device Using a Blue-Violet Laser Diode for Blu-ray Disc System”, The Japan Society of Applied Physics,Vol.42,P880~884,2003。
28. J. S. Sohn,E. H. Cho,M. Lee,H. S. Kim,M. Jung,S. D. Suh,W. C. Kim,N.C. Park,Y. P. Park,“Development of Microlens for High-Density Small-Form-Factor Optical Pickup”, The Japan Society of Applied Physics,Vol.45,No.2B,P1144~1151。
29. Y. S. Kim,S. J. Lee,N. C. Park,Y. P. Park,“Design of wafer-based NA 0.85 micro objective lens and integrated pick up module for small sized optical drive”,Microsystem Technologies,P1048~1055,2005。
30. A. Nakaoki,T. Kondo,K. Saito,M. Sasaura,K. Fujiura,“High Numerical Aperture Hemisphere Solid Immersion Lens Made of KTaO3 with Wide Thickness Tolerance”, Proc. of SPIE Vol. 6282,6282O1~O7,2006。
31. T. D. Milster,“Near-Field Optics: A New Tool for Data Storage”, PROCEEDINGS OF THE IEEE, VOL. 88,P1480~1490,2000。
32. “Reference Guide for Blue Laser Media” 。
33. K. S. Jung,“Design of optical path of pickup for small form factor optical disk drive”,Microsystem Technologies,P1041~1047,2005。
34. J. –S. Sohn,“Design of an integrated optical pickup with NA of 0.85 for small form factor optical disk drives”, Microsystem Technologies,P457~463,2005。
35. B. H. W. Hendriks,“Miniaturised High-Numerical Aperture Plastic Objective for Optical Recording”,Japanese Journal of Applied Physics,Vol.44,No.9A,P6564~6567,2005 。
36. B. H. W. Hendriks,“Miniaturisation of High-NA Objectives for Optical Recording”,OPTICAL REVIEW,Vol.10,No.4,P241~245,2003 。
37. K. H. Jeong,P.Lee,“A New Method of Increasing Numerical Aperture of Microlens for Biophotonics MEMS”,2002IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine&Biology。
38. 陳彰偉,“可調變微球面透鏡與非球面透鏡之研製”,國立清華大學微機電系統工程研究所碩士論文,民國94年7月。
39. 陳迥廷,“設計與製作應用於光學讀取頭之微非球面透鏡”, 國立清華大學微機電系統工程研究所碩士論文,民國95年7月。
40. 國家實驗研究院儀器科技研究中心,“光學元件精密製造與檢測”,民國96年。
41. 許阿娟,朱嘉雯,林佳芬,陳志隆,“OSLO光學系統設計進階篇”,民國91年。
42. E. F. Robert,T. G. Biljana,“Optical System Design”