奈米碳管擁有許多優異的材料特性，可以應用於不同研究領域上。近年來，水平碳管已為半導體產業備受矚目之内部導線材料，本研究利用提出之製程技術將水平碳管整合於於SOI晶片上，藉由微機電(Micro Electro-Mechanical System, MEMS)製程技術可將奈米級材料製作於微米等級元件上，實現具水平碳管之微機電元件，並完成元件在電性上的量測。本研究整合水平碳管於SOI晶片上，提出以下兩項研究目標。第一，利用半導體製程技術製作出微矽模具，藉以定義水平碳管的結構形狀 ; 第二，驗證本文提出之製程技術可批量化製作具水平碳管感測元件，並進而從量測結果探討本研究所成長之水平碳管的感測物理量特性。

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