本研究建立半導體製程設備降低初期投資的方法與商業模式方面之文獻，提出如何建立投資成本控制，生產力改善與設備租賃的方法。
觀察目前半導體產業現況，發現產業景氣波動深受莫耳定律與製程世代快速輪替影響而產生嚴重的同業競爭與淘汱，因為新世代製程設備研發費用高昂，製程技術不再主導全部而導致只有滿手現金或資本雄厚的少數公司能跨入下世代的製程生產線設置的門檻。本研究提供擁有製程技術卻沒有除足夠現金的半導體製造公司另一種獲得生產製程設備的途徑。其二，提供半導體製造公司降低初期投資，增加快速獲利的方式。
在理論上，本研究首先確認半導體產業現況還有半導體製造公司的成本結構與生產力 (Productivity) 的重要指標，進而對目前半導體設備租賃的規模跟商業模式做探討。
本文最後討論理論、實務意涵，以及未來研究建議。

The research to establish methods how to reduce initial investment cost from semiconductor manufacturing equipment and business models. Propose how to establish investment cost control, productivity improvement and equipment rental method.
Observe the current status of the semiconductor industry, found fluctuation industry by mole Law and process generation rapid rotation arising from the impact of serious competition in the industry, because the new generation of manufacturing equipment research and development costs high, process technology is no longer dominated all caused only a hand full of cash or capitalized few companies able entered the threshold of the next advance generation node. This study provides another production process equipment sources for who ready process technology but did not have enough cash. Secondary, provides method to reduce the initial investment, increase profits fast way for semiconductor manufacturing companies.
In theory, this study first to confirm the status of the semiconductor industry as well as semiconductor manufacturing company's cost structure and important indicator of productivity, and then discss the current scale of the semiconductor equipment rental and business model. .
Finally, a theoretical discussion, practical implications, and recommendations for future research.

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