研究生: |
蘇祐松 Su, yu-sung |
---|---|
論文名稱: |
非晶態之銦鎵摻雜氧化鋅薄膜電晶體於偏壓與光敏性在不同環境下之探討 Investigate on the environment-Dependent Bias Stress and Photosensitive Characteristics of a-IGZO TFT |
指導教授: |
葉鳳生
Yeh(Huang), Fon-Shan |
口試委員: |
葉鳳生
Yeh(Huang), Fon-Shan 張鼎張 Chang, Ting-Chang 許錚宗 Sheu, Jeng Tzong 戴亞翔 Tai, Ya-Hsiang |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 半導體元件及製程產業研發碩士專班 Industrial Technology R&D Master Program on Semiconductor Devices and Manufacturing Process |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 英文 |
論文頁數: | 60 |
中文關鍵詞: | 薄膜電晶體 、非晶態銦鎵摻雜氧化鋅 、偏壓 、光敏性 、不同環境 |
外文關鍵詞: | TFT, a-IGZO, bias, Photosensitive, environment-Dependent |
相關次數: | 點閱:4 下載:0 |
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Nowadays thin-film-transistor (TFT) has been widely used in flat panel displays, which is used whether in mobile phone, MP3 or LCD-TV. As the evolution with technology, flat panel display becomes larger and more sophisticated. In the development of large scale display, we need to consider the uniformity of TFT materials. In high-frequency operation (ex. 3-D screen), we have to use the material with higher mobility.
The most commonly used materials in TFT are poly-silicon and amorphous-silicon. Compared the poly-Si and a-Si with a-IGZO, the a-IGZO is considered to be the next generation of materials used in TFTs, due to the perfect uniformity and well mobility at same time. However a-IGZO TFT has several instabilities such as gate bias stress, light
illumination and oxygen adsorption effect.
Previous studies have discussed the phenomenon. However, the instabilities compared in different ambience are rarely mentioned. Now we investigate on the environment-dependent bias stress and photosensitive characteristics of a-IGZO TFT. We use Positive/Negative Bias Stress (PBS/NBS) and light-illumination in different ambience to discuss the degradation of a-IGZO TFT. We found the positive bias stress (PBS) induce the oxygen adsorption on a-IGZO surface by the increasing electron concentration. Besides, the negative bias stress didn’t not cause any degradation on a-IGZO in any kind of environment by channel carrier depletion. Although oxygen will cause the higher threshold voltage, oxygen can effectively suppress the negative threshold voltage shift caused
by photo-generated charges.
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