目前高效率矽晶太陽能電池發展中，背電極矽晶太陽能電池效率可達24.2%，可說是目前商業矽晶太陽能電池中相當有前景的一項。要達到高效率矽晶太陽能電池，必須兼顧各項影響能量轉換效率的因素。其中，由於背電極設計免除了正面的電極遮蔽，使得短路電流( short-circuit Current ,Jsc ) 遠高於傳統矽晶太陽能電池，在開路電壓部分(open-circuit Voltage ,Voc )，則需要較佳的表面鈍化、矽基材本身品質的要求，以及製程間的清潔度。影響填充因子的因素則包含了串聯電阻 ( series resistance , Rs )與並聯電阻 ( shunt resistance , Rsh )，在我們的背點電極設計中，電極被縮小至數微米，使得電流的輸出受阻，因此增加串聯電阻。因此我們會設計一量測接觸電阻 ( Contact resistance )的方式，來探討如何降低接觸電阻，也就是降低串聯電阻。
本文旨在建立一背點電極矽晶太陽能電池的製作流程，並針對各式製程可能產生的問題作一改善。經由適當調整或變更製程，找出最理想的製程參數，以達到最高效率為目標作一努力。截至目前為止，最佳效率約有19.3%，雖然相較其他背電極矽晶太陽能電池仍不夠出色，但更重要的是能否找出問題所在，對未來高效矽晶太陽能電池的製作提出方向。

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