摘要

積體化光學元件在光通訊產業中一直是十分重要的一環，然而以矽(Silicon)為基底實作的元件也十分的廣泛。本論文提出了一種結構水平漸變的矽光波導，透過半導體製程實作，並結合了黃光微影製作的聚合物波導，達到高效率的光纖與積體化矽光波導耦合。
我們先將設計好之雛形，利用Rsoft公司發行的BeamProp光學軟體進行模擬。本論文實作方面則是採用了SU-8聚合物做為矽波導與光纖之間的抗反射材料，利用它成本較為低廉、且藉由黃光微影製程即可實作出結構的特性，做為耦合器前段的材料。突破了以往只利用矽製作出之多層錐形波導耦合器所面臨的光能量反射問題(Fresnel’s reflection)。且架構中水平錐形矽波導為單層結構，免除了必須在製作多層錐形矽波導時，多次的乾式蝕刻導致尖端線寬的失真。

參考文獻
[1] Chris W. Barnard and John W. Y. Lit, “Mode transforming properties of tapered single-mode fiber microlenses,” Appl. Opt., vol. 32, no. 12, p. 20, 1993.

[2] Chris W. Barnard and John W. Y. Lit, “Single-mode fiber microlens with controllable spot size, ” Appl. Opt., vol. 30, no. 15, p.1958, 1991
.
[3] V. Ta’eed, D. J. Moss, Y. Miao, H. C. Nguyen, E. C. Magi, and B. J. Eggleton, “Tapered micro-structured optical fiber pigtails for waveguide coupling,” in Quantum Electronics and Laser Science Conference (QELS), Baltimore, Maryland, May 22, 2005.

[4] Joel Seligson, “Prism couplers in guided-wave optics: design consideration,” Appl. Opt., vol. 26, no. 13, p. 2609, 1987.

[5] D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express, vol. 18, no. 17, p. 18278, 2010.

[6] Frederik Van Laere, Günther Roelkens, Melanie Ayre, Jonathan Schrauwen, Dirk Taillaert, Dries Van Thourhout, Thomas F. Krauss, and Roel Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol., vol. 25, no. 1, p. 151, 2007.

[7] Bin Wang, Jianhua Jiang, and Gregory P. Nordin, “Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides,” IEEE Photon. Technol. Lett., vol. 17, no. 9, p. 1884, 2005.

[8] Günther Roelkens, Dries Van Thourhout, and Roel Baets, “High efficiency silicon-on-insulator grating coupler based on a poly-Silicon overlay,” Opt. Express, vol. 14, no. 24, p. 11622, 2006.

[9] F. AbdelMalek, W. Belhadj, S. Haxha, and H. Bouchriha, “Realization of a High Coupling Efficiency by Employing a Concave Lens Based on Two-Dimensional Photonic Crystals With a Negative Refractive Index,” J. Lightwave Technol., vol. 25, no. 10, p. 3168, 2007.

[10] M. Notomi, “Theory of light propagation in strongly modulated photonic crystals: Refraction like behavior in the vicinity of the photonic band gap,” Phys. Rev. B, Condens. Matter, vol. 62, no. 16, p. 10696, 2000.

[11] S. Foteinopoulou, E. N. Economou, and C. M. Soukoulis, “Refraction in media with a negative refractive index,” Phys. Rev. Lett., vol. 90, no. 10, p. 107 402-1, Mar. 2003.

[12] Takayuki Mizuno, Tsutomu Kitoh, Mikitaka Itoh, Takashi Saida, Tomohiro Shibata, and Yoshinori Hibino, “Optical spotsize converter using narrow laterally tapered waveguide for planar lightwave circuits,” J. Lightwave Technol., vol. 22, no. 3, p. 833, 2004.

[13] Ingrid Moerman, Peter P. Van Daele, and Piet M. Demeester, “A review on fabrication technologies for the monolithic integration of tapers with III–V semiconductor devices,” IEEE J. sel. top. Quantum electron., vol. 3, no. 6, p. 1308, 1997.

[14] Peng Sun and Ronald M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express, vol. 17, no. 6, p. 4565, 2009.

[15] Anita Sure, Thomas Dillon, Janusz Murakowski, Chunchen Lin, David Pustai and Dennis W. Prather, “Fabrication and characterization of three-dimensional silicon tapers,” Opt. Express, vol. 11, no. 26, p. 3555, 2003.

[16] Na Fang, Zhifeng Yang, Aimin Wu, Jing Chen, Miao Zhang, Shichang Zou, and Xi Wang, “Three-dimensional tapered spot-size converter based on (111) silicon-on-insulator,” IEEE Photon. Technol. Lett., vol. 21, no. 12, p. 820, 2009.

[17] Kenji Kawano, Tsutomu Kitoh, Introduction to optical waveguide analysis, John Wiley & Sons.

[18] Y. Chung and N.Dagli, “An assessment of the finite difference beam propagation method,” IEEE J. Ouantum Electon., vol. 26, p. 1335, 1990.

[19] P.L. Liu, S.L. Yang and D.M. Yuan, “The semivectorial beam propagation method,” IEEE J. Ouantum Electron., vol. 29, no. 4 , p. 1205, 1993.

[20] S. Y. Cheng, K. S. Chiang, and H. P. Chan, “Birefringence in Benzocyclobutene strip optical waveguides,” IEEE Photon. Technol. Lett., vol. 15, no. 5, p. 700, 2003.

[21] Payam Rabiei and William H. Steier, “Tunable polymer double micro-ring filters,” IEEE Photon. Technol. Lett., vol. 15, no. 9, p. 1255, 2003.

[22] A. Borreman, S. Musa, A.A.M. Kok, M. B. J. Diemeer and A. Driessen, “Fabrication of polymeric multimode waveguides and devices in SU-8 photoresist using selective polymerization,” In IEEE/LEOS Benelux Chapter 2002 Annual Symposium. Vrije Universiteit Amsterdam, Amsterdam, 2002.

[23] Hong Xiao, 半導體製程技術導論, 學銘圖書有限公司.

[24] 李政霖, 折射率漸變多曾錐狀光纖耦合器, 國立清華大學光電工程研究所, 碩士論文, 2010.

[25] 鮑則源, 在矽晶圓上沉積二氧化矽之一分八分光器的模擬設計與製作, 國立清華大學電機工程系碩士班, 碩士論文, 2005.

[26] 高邦瀚, 結合微流體力聚焦法與層流現象在微粒尺寸分離之應用, 國立成功大學航空太空工程學系, 碩士論文, 2006.