研究生: |
劉俊傑 Liu, Jiun-Jie |
---|---|
論文名稱: |
8×32 CMOS電容式觸覺感測器陣列和8位元連續漸近式類比數位轉換器的設計與製作 Design and Implementation of a 8×32 CMOS MEMS capacitive tactile Sensor array with an 8-bit Successive Approximation Analog-to-Digital Converter |
指導教授: |
盧向成
Lu, Shiang-Cheng |
口試委員: |
邱一
Chiu, Yi 劉承賢 Liu, Cheng-Hsien 盧向成 Lu, Shiang-Cheng |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 中文 |
論文頁數: | 88 |
中文關鍵詞: | 電容感測 、指紋感測 、微機電 、連續漸近式類比數位轉換器 |
外文關鍵詞: | Capacitive, CMOS MEMS, Fingerprint, SARADC |
相關次數: | 點閱:2 下載:0 |
分享至: |
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這項研究,成功的設計並製造出整合於積體電路上的指紋感測器與類比數位轉換器,利用CMOS後製程產生8×32感測陣列,每一感測元件由金屬層與介電層組合而成,所以不需再作額外的薄膜沉積,而感測電路置於感測元件下方來縮小晶片面積並進一步提高感測度。每一感測元件大小55 um×55 um,影像解析度為461 dpi,起始的電容值為12 fF,此晶片的平均感測度為2.1 fF/Mpa而輸出靈敏度為206 mV/Mpa,得到指紋感測器輸出的類比訊號後經由八位元連續漸近式類比數位轉換電路產生數位輸出,類比數位轉換器取樣率0.5MHz;最後晶片搭配FPGA將數位資料取出由電腦來產生二維圖像,可以成功的擷取指紋圖像。
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