本研究成功的利用聚二甲基矽氧烷(PDMS)做為基材，透過均質乳化法製作多孔結構，進而以高電場促使空穴內部的空氣解離，並將極性相反的電荷植入儲存在空穴的上下表面，產生具備壓電特性的軟質高分子材料。傳統的壓電性高分子材料種類有限，加工與成形不便，與微製程相容性低，造成整合困難與應用受阻。本研究所開發的PDMS壓電材料具有製程簡單與相容性高的優點，可被廣泛應用於微機電系統中，做為機電訊號轉換的關鍵元件。在多孔結構的製作上，我們利用均質乳化法將水打散混入PDMS預聚體(pre-polymer)中，並引入介面活性劑以穩定所形成的油包水乳化結構，之後再加入固化劑並加熱使PDMS固化，此時水滴仍殘留在結構內部，最後再加熱使水滴蒸發離開PDMS結構而形成空穴。PDMS多孔結構的孔隙率可透過水含量加以控制，空穴的大小多在五微米以下。在電荷植入儲存的方面，使用數千伏特高壓脈衝在空穴內反覆放電可達到累積加成的效果，另外小空穴尺寸與高孔隙率更有助於整體電荷儲存量的提昇。製作所得的材料雛型則利用電荷放大器量測分析其壓電特性，純PDMS結構在充電後其壓電係數可達53 pC/N，若進一步在製作過程中於PDMS基材內混入諸如奈米粒子之類的異質材料，其壓電係數還可進一步提高(以加入氧化鐵為例其壓電係數可達80 pC/N以上)。透過製程整合，本研究所開發的PDMS壓電材料可望被應用於壓力感測器與環境能源擷取之類的應用。

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