L10-FePt with different nanostructures has attracted great interest in recent years because of their applications in many regions. However, a much higher ordering temperature for patterned FePt nanostructures than that of a continuous FePt thin film remains an open issue. In this work, the promising method is demonstrated to obtain the large-area L10 FePt with network nanostructures as well as perpendicular magnetic anisotropy at low ordering temperature (T < 400℃) by plasma etching with the mask of porous anodic aluminum oxide (AAO). The AAO mask is directly fabricated on L10 FePt thin films by anodizing the Al film. The microstructure of network FePt was observed, which is almost the same as that of the AAO mask. The mean pore diameter of FePt network is slightly smaller than the AAO mask, and the density is 4 × 1010 cm-2. The out-of-plane coercivity (Hc⊥) for network FePt is enhanced by 20 % larger than that for a continuous film. The pores act as the pinning sites for the domain walls. Therefore, the FePt film with a network structure as well as perpendicular anisotropy can be fabricated easily by AAO, which provides a new way to pattern magnetic films and benefits to the applications.

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