簡易檢索 / 詳目顯示

研究生: 黃聖淵
Huang, Sheng-Yuan
論文名稱: 壓電高分子奈米結構薄膜開發及其表面型態與壓電性質之探討
Nanoimprint of Piezoelectric Polymer Films and Investigation of Their Morphology and Piezoelectricity
指導教授: 洪健中
Hung, Chien-Chung
口試委員: 謝健
Shieh, Jiann
李紫原
Lee, Tzu-Yuan
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2011
畢業學年度: 99
語文別: 中文
論文頁數: 113
中文關鍵詞: 氟化三氟聚乙烯壓電高分子薄膜極化製程奈米壓印次20奈米高深寬比結構
外文關鍵詞: PVDF-TrFE, Piezoelectric polymer film, Polarization, Hot-Embossing - Nanoimprint Lithography, Sub-20 nanometer high-aspect-ratio nanostructures
相關次數: 點閱:2下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 本論文專利申請中,暫不公開


    著作發表與專利申請中

    [1] R. Rosario, D. Gust, A. A. Garcia, M. Hayes, J. L. Taraci, T. Clement, J. W. Dailey, S. T. Picraux, “Lotus Effect Amplifies Light-Induced Contact Angle Switching”, Journal of Physics and Chemistry B, Vol.108, 12640–12642 (2004)
    [2] C. S. Hwang, “(Ba,Sr)TiO3 thin films for ultra large scale dynamic random access memory. A review on the process integration”, Materials Science and Engineering, Vol.B56, 178–190 (1998)
    [3] H. Iizuka, F. Masuoka, T. Sato, M. Ishikawa, “Electrically Alterable Avalanche -Injection-Type MOS READ-ONLY Memory with Stacked-Gate Structure”, IEEE Transactions on Electron Devices, Vol.23, 379–387 (1967)
    [4] J.L. Moll, Y. Tarui, “A new solid state memory resistor ”, IEEE Transactions Electron Devices (1963)
    [5] Y. J. Park, S. J. Kang, Y. J. Shin, R. H. Kim, I. Bae, C. Park, “Non-volatile memory characteristics of epitaxially grown PVDF-TrFE thin films and their printed micropattern application”, Current Applied Physics xxx 1-5 (2011)
    [6] M. Sayer, “Piezoelectric Thin Film Devices”, IEEE Ultrasonics Sympostum, Vol.1, 595–603 (1991)
    [7] W. I. Kinney, W. Shepherd. W. Miller, J. Evans R. Womack, “A non-volatile memory cell based on ferroelectric storage capacitors”, International Electron Devices Meeting, Vol.87, 850–851 (1987)
    [8] N. Kikuchi, E. Kusano, E. Kishio, A. Kinbara, “Electrical and mechanical properties of SnO2 : Nb films for touch screens”, Vacuum , Vol.66, 365–371 (2002)
    [9] P. Dietz, D. Leigh, “Diamond Touch: A Multi-User Touch Technology”, Symposium on User Interface Software and Technology, Vol.1, 219–226 (2001)
    [10] K. P. Gung , “Computer interface and touch sensitive screens”, IEEE, Vol.2, 98–100 (1989)
    [11] J. B. Penella, “Smart materials for microrobotics. Motion Control and Power Harvesting” , 254pp
    [12] A. Bailato, “Piezoelectricity: History and New Thrusts”, IEEE Ultrasonics Sympostum, Vol.1, 575–583 (1996)
    [13] B. Jaffe, R.S. Roth, S. Marzullo, “Piezoelectric Properties of Lead Zirconate ‐Lead Titanate Solid‐Solution Ceramics”, Journal of Applied Physics, Vol.1, 809–810 (1954)
    [14] H. B. Fang, J. Q. Liu, Z. Y. Xu, L. Dong, L. Wang, D. Che , B. C. Cai, Y. Liu, “Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting” , Microelectronics Journal, Vol.37, 1280–1284 (2006)
    [15] F. Li, W. Liu, C. Stefanini, X. Fu, Paolo Dario, “A Novel Bioinspired PVDF Micro/Nano Hair Receptor for a Robot Sensing System”, Sensors, Vol.10, 994–1011 (2010)
    [16] X. Wang, C.r J. Summers, Z. L. Wang, “Large-Scale Hexagonal-Patterned Growth of Aligned ZnO Nanorods for Nano-optoelectronics and Nanosensor Arrays”, Nano Letters, Vol.4, 423–426 (2004)
    [17] X. Chen, S. Xu, N. Yao, Y. Shi, “1.6 V Nanogenerator for Mechanical Energy Harvesting Using PZT Nanofibers”, Nano Letters, Vol.10, 2133–2137 (2010)
    [18] L. J. Heyderman, H. Schift, C. David, J. Gobrecht, T. Schweizer, “Flow behaviour of thin polymer films used for hot embossing lithography”, Microelectronic Engineering, Vol.54, 229–245 (2000)
    [19] H. Schift, L. J. Heyderman, M. A. Maur, J. Gobrecht, “Pattern formation in hot embossing of thin polymer films”, Nanotechnology, Vol.12, 173–177 (2001)
    [20] E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Miinchmeyer, “Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)”, Microelectronic Engineering, Vol.4, 35-56 (1986)
    [21] C. Goh, K. M. Coakley, M. D. McGehee , “Nanostructuring Titania by Embossing with Polymer Molds Made from Anodic Alumina Templates”, Nano Letters, Vol.5,1545–1549 (2005)
    [22] C. P. Hernandez , J. S. Kim, P. F. Fu, L. J. Guo , “Nonresidual layer imprinting and new replication capabilities demonstrated for fast thermal curable polydimethysiloxanes”, American Vacuum Society Technology, Vol.B25, 2402– 2406 (2007)
    [23] U. Plachetka, M. Bender, A. Fuchs, B. Vratzov, T. Glinsner, F. Lindner, H. Kurz, “Wafer scale patterning by soft UV-Nanoimprint Lithography”, Microelectronic Engineering, Vol.73, 167–171 (2004)
    [24] L. Vayssieres, K. Keis, A. Hagfeldt, S.E. Lindquist, “Three-Dimensional Array of Highly Oriented Crystalline ZnO Microtubes”, Chemistry of Materials, Vol.13, 4395–4398 (2001)
    [25] R. S. Dahiya, M. Valle, G. Metta, “Deposition, Processing and Characterization of P(VDFTrFE) Thin Films for Sensing Applications”, IEEE SENSORS Conference, Vol.1, 490–493 (2008)
    [26] C. Chang, V. H. Tran, J. Wang, Y.K. Fuh, L. W. Lin, “Direct-Write Piezoelectric Polymeric Nanogenerator with High Energy Conversion Efficiency”, Nano Letters , Vol. 10, 726–731 (2010)
    [27] C.Y. Li, P.M. Wu, S.Y. Lee, A. Gorton, M. J. Schulz, C. H. Ahn, “Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer”, Journal of Microelectromechanical Systems, Vol. 17, 334–341 (2008)
    [28] J. Xu, M.J. Dapino, D. Gallego-Perez ,D. Hansford, “Microphone based on Polyvinylidene Fluoride (PVDF) micro-pillars and patterned electrodes”, Sensors and Actuators A, Vol.153, 24–32 (2009)
    [29] Z.J. Hu, M.W. Tian, B. Nysten, A. M. Jonas, “Regular arrays of highly ordered ferroelectric polymer nanostructures for non-volatile low-voltage memories”, Nature Materials , Vol. 8, 62–67 (2009)
    [30] P. A. Rodcers, “Pressure-Volume-Temperature Relationships for Polymeric liquids: A Review of Equations of State and Their Characteristic Parameters for 56 Polymers”, Journal of Applied Polymer Science, Vol.48, 1061–1080 (1993)
    [31] J. Wang, H. Li, J. Liu, Y. Duan, S. Jiang, S. Yan, ”On the α->β Transition of Carbon-Coated Highly Oriented PVDF Ultrathin Film Induced by Melt Recrystallization”, Journal of American Chemistry Society, Vol.125, 1496–1497 (2003)
    [32] X. He, K. Yao, “Crystallization mechanism and piezoelectric properties of solution-derived ferroelectric poly(vinylidene fluoride) thin films”, Applied Physics Letters, Vol. 89, 112909 – 112909-3 (2006)
    [33] R. D. Simoes, M. A. Rodriguez-Perez, J. A. de Saja, C. J. L. Constantino, “Thermomechanical characterization of PVDF and P(VDF-TrFE) blends containing corn starch and natural rubber”, Journal of Thermal Analysis Calorimetry, Vol.99, 621–629 (2010)
    [34] K. Noda, K. Ishida, A. Kubono, T. Horiuchi, H. Yamada, K. Matsushige, “Remanent polarization of evaporated films of vinylidene fluoride oligomers”, Journal of Applied Physics, Vol.93, 2866–2870 (2003)
    [35] H. Kawai, “The piezoelectricity of polyvinylidene fluoride”, Japanese Journal of Applied Physics, Vol. 8, 975–976 (1969)
    [36] R. C. Preston, D. R. Bacon, A. J. Livett and K. Rajendran, “PVDF membrane hydrophone performance properties and their relevance to the measurement of the acoustic output of medical ultrasonic equipment”, Journal of Physics E: Scientific Instruments, Vol.16, 786–796 (1983)
    [37] K. Hosoda, Y. Tada, M. Asada, “Anthropomorphic robotic soft fingertip with randomly distributed receptors”, Robotics and Autonomous Systems, Vol.54, 104–109 (2006)
    [38] N. Perez, C. Negreira, H. Gomez, C. Bello, “Piezocomposite array transducers optimization by breaking periodicity”, IEEE Ultrasonics Symposium, Vol.2, 1081–1084 (1999)
    [39] S. Roundy, P. K. Wright, J. Rabaey, “A study of low level vibrations as a power source for wireless sensor nodes”, Computer Community, Vol.26, 1131–1144 (2003)
    [40] Z. L. Wang, “Energy Harvesting for Self-Powered Nanosystems”, Nano Research, Vol.1, 1–8 (2008)
    [41] E. Roncari, C. Galassi, F. Craciun, C. Capiani, A. Piancastelli, “A microstructural study of porous piezoelectric ceramics obtained by different methods”, Journal of the European Ceramic Society, Vol.21, 409–417 (2001)
    [42] D. Dasgupta, S. Manna, A. Garai, A. Dawn, C. Rochas, J. M. Guenet, A. K. Nandi, “Morphology, Structure, Rheology, and Thermodynamics of Piezoelectric Poly(vinylidene fluoride)-Ethylene Carbonate Thermoreversible Gel”, Macromolecules, Vol.41, 779–787 (2008)
    [43] F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Francais, Y. Mita, T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures”, Microelectronics Journal, Vol.36, 673–677 (2005)
    [44] M. C. Yang, J. Shieh, C. C. Hsu, T. C. Cheng, “Well-Aligned Silicon Nanograss Fabricated by Hydrogen Plasma Dry Etching”, Electrochemical and Solid-State Letters, Vol.8, C131–C133 (2005)
    [45] C. K. Kang, S. M. Lee, I. D. Jung, P. G. Jung, S. J. Hwang, J. S. Ko, “The fabrication of patternable silicon nanotips using deep reactive ion etching”, Journal of Micromechanics and Microengineering, Vol.18, 1–7 (2008)
    [46] Y. T. Cheng, D. E. Rodak, C. Wong, C. A. Hayden,“Effects of micro- and nano-structures on the self-cleaning behaviour of lotus leaves”, Nanotechnology, Vol.17, 1359–1362 (2006)
    [47] O. Dangles, D. Pierre, C. Magal, F. Vannier J. Casas, “Ontogeny of air- motion sensing in cricket”, The Journal of Experimental Biology, Vol.209, 4363–4370 (2006)
    [48] C. Dulac, B. Grothe, “Spider mechanoreceptors”, Current Opinion in Neurobiology, Vol.14, 415–422 (2004)
    [49] J. Goulet, J. Engelmann, B. P. Chagnaud, J. M. P. Franosch, M. D. Suttner J. Leo, “Object localization through the lateral line system of fish: theory and experiment”, J Comp Physiol A, Vol.194, 1–17 (2008)
    [50] M. Sun, C. Luo, L. Xu, H. Ji, Q. Ouyang, D. Yu, Y. Chen, “Artificial Lotus Leaf by Nanocasting”, Langmuir, Vol.21, 8978–8981 (2005)
    [51] H. M. Chen, C. F. Hsin, R. S. Liu, S. F. Hu, C. Y. Huang, “Controlling Optical Properties of Aluminum Oxide Using Electrochemical Deposition”, Journal of the Electrochemical Society, Vol.154, K11–K14 (2007)
    [52] J. Shieh, F. J. Hou, Y. C. Chen, H. M. Chen, S. P. Yang ,C. C. Cheng, H. L. Chen, “Robust Airlike Superhydrophobic Surfaces”, Advance Materials, Vol.21, 1–5 (2009)
    [53] Y. H. Ye, D. Y. Jeong, Q. M. Zhang, “Fabrication of strain tunable infrared frequency selective surfaces on electrostrictive poly(vinylidene fluoride– trifluoroethylene) copolymer films using a stencil mask method”, Applied Physics Letters, Vol. 85, 654–656 (2004)
    [54] C. C. Hong, P. Huang, J. Shieh, “Fabrication of Morphology-Controlled Sub-20-nm Polymer Nanotip and Nanopore Arrays Using an Identical Nanograss Mold”, Macromolecules, Vol.43, 7722–7728 (2010)
    [55] N. Yamauchi, “A metal-Insulator-Semiconductor (MIS) Device Using a Ferroelectric Polymer Thin Film in the Gate Insulator”, Japanese Journal of Applied Physics, Vol.25, 590–594, (1986)
    [56] X. Zhou, X.H . Zhao, Z. G. Suo, C. Zou, J. Runt, S. Liu, S. H. Zhang, Q. M. Zhang, “Electrical breakdown and ultrahigh electrical energy density in poly(vinylidene fluoride hexafluoropropylene) copolymer”, Applied Physics Letters, Vol.94, 162901–1162901-3, (2009)
    [57] K. Omura, Md, Abul Kashem, S. Morita, “C-Au-S Semiconducting Layers for PVDF Ferroelectric Electron Emission”, Journal of Photopolymer Science and Technology, Vol.16, 55–60 (2003)
    [58] S. Ducharme, A. V. Bune, L. M. Blinov, V. M. Fridkin, S. P. Palto, A. V. Sorokin, S. G. Yudin, “Critical point in ferroelectric Langmuir-Blodgett polymer films”, Physical Review B, Vol.57, 25–28 (1998)
    [59] C. C. Leu, C. Y. Chen, C. H. Chien, M. N. Chang, F. Y. Hsu, C. T. Hu, “Domain structure study of SrBi2Ta2O9 ferroelectric thin films by scanning capacitance microscopy”, Applied Physics Letters, Vol.82, 3943–3495 (2003)
    [60] Y. M. Liu, D. N. Weiss, J. Y. Li, “Rapid Nanoimprinting and Excellent Piezoresponse of Polymeric Ferroelectric Nanostructures”, ACS NANO, Vol.4, 83–90 (2010)
    [61] S. S. Je, T. Sharma, Y. K. Lee, B. Gill, J. X. Zhang, “A Thin-Film Piezoelectric PVDF-TrFE Based Implantable Pressure Sensor Using Lithographic Patterning”, Proceedings of MEMS 2011, 644–647
    [62] J. Shieh, F. J.Hou, Y. C.Chen, H. M.Chen, S. P.Yang, C. C.Cheng, H. L.Chen, “Robust Airlike Superhydrophobic Surfaces”, Advanced Material, Vol.21, 1–5 (2009)

    無法下載圖示 全文公開日期 本全文未授權公開 (校內網路)
    全文公開日期 本全文未授權公開 (校外網路)
    全文公開日期 本全文未授權公開 (國家圖書館:臺灣博碩士論文系統)
    QR CODE