本論文討論軟Ｘ光同調散射實驗技術的建立。同調Ｘ光散射影像顯微術(CDI)以高同調性Ｘ光為光源，量測樣品的繞射圖紋，並以相位演算法進行影像的重建。Ptychography為掃描式CDI，藉由光束線在影像上重疊的效果，可以更精準的重建影像。在軟Ｘ光能量範圍內，Ptychography的影像解析度可以達到3nm。
本實驗為第一個使用同步輻射中心光束線TPS 41A進行軟Ｘ光Ptychography實驗研究，先使用標準樣品進行不同實驗參數的Ptychography影像分析，例如：有無使用針孔(pinhole)、改變針孔的大小（2μm、5μm），並找出最適合的實驗參數，實驗結果發現在5μm針孔後加上一層1μm 的Si_3 N_4進行實驗時，可阻擋來自針孔的散射光，使得我們可以重建出較完整、正確的影像。接著，以 Nd_0.5 Ca_0.5 MnO_3為樣品，透過量測在錳的Ｌ吸收邊界附近能量的Ptychography，藉此了解此化合物的物理特性。實驗結果發現入射光能量在650eV的重建影像較為完整。

This thesis discusses the experimental technique development of soft X-ray coherent diffraction imaging. Coherent diffraction imaging (CDI) uses coherent X-rays to measure the diffraction pattern of a sample. It uses a phase retrieval algorithm to reconstruct images. Ptychography is a scanning CDI, which can get reconstructed images accurately by overlapping adjacent illuminations. The spatial resolution of reconstructed images in soft X-ray ptychography can reach 3 nm.

We present the first experimental results of soft X ray ptychography using the 41A beamline of Taiwan Photon Source. We used standard samples for ptychography image analysis under different conditions, for example, pinholes of different sizes. The results show that we can improve the resolution of a reconstructed image using a 1μm Si_3 N_4 placed behind a 5μm pinhole. Furthermore, we varied photon energy around the Mn L edge absorption to record ptychography of Nd_0.5 Ca_0.5 MnO_3 particles.

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