本研究目的為設計開發以機械式放大機構為基礎的低成本次微米級位移感測裝置及位移致動裝置，並將之結合成一低成本的精密致動系統。此位移感測器裝置的基本原理係將欲量測之次微米位移透過一多層槓桿機構放大百倍至10微米等級後，以霍爾元件讀取放大後的位移。此前第一代試驗機實驗研究顯示，多層槓桿機構之放大率重現性良好，故經使用光學或渦電流計校準後，霍爾元件讀數可以判讀次微米位移，重複精度為0.4 m。本研究重點為將裝置縮小化，試驗機尺寸將由82×28×24mm將其縮小至25×11×12 mm，3層槓桿減為2層槓桿。位移致動器則是將一不等傾角機構與平行四連桿機構組成一三明治結構，使機構側搖時產生縮小的高度差用以修正感測器所量測到的誤差。此前實驗研究已展示1000倍縮小率，可以在天頂方向行微米級運動，最大行程為30微米。本研究重點為改良第一代試驗機，使其可以進退兩方向運動，並確保運動的重複精度，同時使機構也可以在斜向或水平方向運動。最後將位移感測裝置及位移致動裝置結合成一精密致動系統。由於此系統組合使用簡單機構與低成本組件即可得到精密位移，故本研究有一定的商業潛力。

This research develops a low-cost micro displacement sensor, a low-cost micro-displacement actuator, both based on mechanical magnification mechanisms, and a low-cost precision actuation system combining the sensor and the actuator. The principle of the micro displacement sensor is to magnify submicron displacement through a multi-layer linkage structure by one hundred times into millimeter range. This displacement is then measured by a hall sensor. Based on a first generation prototype, this work reduces the number of arms of the mechanical mechanism used in the micro displacement sensor from 3 to 2 and the overall size from 82×28×24mm to 25×11×12 mms while maintaining measurement range at 10 m with measurement precision of 0.5m and resolution of 0.092μm. The micro-displacement actuator is constructed based on an Uneven-Legs Tilting mechanism sandwiched between two parallel four-bar linkage and is capable of providing a reduction of displacement by a factor 100 to 1000, depending on specific mechanisms. An analytical model was developed for designing the mechanism for desired load and displacement range. This work develops a prototype of an actuator, bases on flexural hinge mechanisms, capable of 5 to 40 m displacement output with precision of 0.34μm and resolution of 0.14μm. A combined sensor and actuator system was made to apply closed-loop control of actuation setting and further improved the accuracy to 0.2μm. The simple construction using low-cost components of the system indicates its commercial potential.

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