智慧型手機及平板電腦的爆炸性需求帶動了28nm製程設備的大幅成長，甚至連台灣晶圓代工大廠都無法百分之百滿足訂單需求而緊急擴充28nm產線。為及早因應將至的龐大市場，也開始導入20nm製程，在半導體產業的元件尺度微縮化競賽中，最為關鍵的領先因素即是製程設備的優勝劣敗，擁有最先進的製程設備與製程環境將能確保自身立於不敗之地。而半導體製程設備中影響尺度微縮最關鍵的設備即是微影設備，微影設備的發展在在牽動著半導體設備產業以及半導體產業的發展。
然而影響產業如此關鍵的設備，理應是個競爭激烈的市場，但隨著半導體製程的線寬越小，設備的精密度要求越高，能投入的廠家並不多，甚至近年來幾乎由艾司摩爾(ASML)獨占市場，而艾司摩爾(ASML)這間歐洲公司卻只獨專精於微影設備，它是如何成為前三大半導體設備的供應商，又其提供給下游半導體製造業者什麼樣的價值，讓它能引領半導體設備市場呢？
本研究期望藉由相關文獻整理以及產業分析，探討艾司摩爾(ASML)如何透過與全球晶圓代工廠及上游供應商的合作，維持其競爭優勢。
研究發現製程的技術已成為產業競爭的來源，設備商需與製造商合作才能突破物理條件的限制，共同研發次世代設備。而為了能更快速的創造出好產品，系統廠商將多數零件委由供應商製造，自己負責組立及品質測試。而為了確保產品的高品質，系統廠商建立了供應商的審查機制，但相對的，系統廠商也會提供供應商相關的協助與配合，以維持其競爭力，創造永續的共同利益。

The explosive demand of smart phones and tablet PCs led to substantial growth of equipments of 28nm process. Even the biggest foundry manufacturer is not 100% meeting the orders and an emergency expansion of 28nm production line is needed. In anticipation of a huge market in the next few years, manufactures are ready to import the 20nm process at an early stage. In the semiconductor industry, the most critical factor of component scale is the quality of the process equipments. Manufacturer who owns the most advanced process equipments and process environment will be at an invincible position. The most critical equipment in the semiconductor process equipments is lithography equipment. The development of lithography equipment affects the development of semiconductor equipment industry, as well as the semiconductor industry.
However, the impact of such critical industry equipment is supposed to be a highly competitive market, but as the line width of the semiconductor manufacturing process decreases, the equipments require greater precision and this limits the number of manufacturers entering the market. In recent years, European company, ASML, almost monopolized the market, while ASML only specializes in lithography equipment, how did ASML become the top three suppliers of semiconductor equipment, and what values do ASML bring to the down-stream semiconductor manufacturers, which enables them to lead the semiconductor equipment market？
Through the relevant literature and industry analysis, the present study hopes to discuss how ASML maintained its competitive advantages through cooperation with global foundries and upstream suppliers.

The results of study show that the technology of process has become the source of industry competition. Equipment manufacturers need to cooperate with semiconductor manufacturers in order to break the limitations of this physical condition, and co-develop the next-generation equipment. To be able to create quality products more efficiently, system vendors let the suppliers manufacture the majority of the components, while themselves responsible for the assembling and quality testing. In order to ensure high product quality, system vendors establish a review mechanism on the suppliers. At the same time, system vendors will also provide suppliers with the assistance and cooperation needed to maintain their competitiveness, thus creating sustainable common interests.

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網路部分：
1.聯合新聞網，http://udn.com/NEWS/main.html(05.2012)
2.工業技術研究院網站，http://www.itri.org.tw
3.ASML企業網站，http://www.asml.com
4.SEMI網站，http://www.semi.org/ch/