微掃瞄鏡驅動方式以靜電致動最為常用，主要是因為它具有結構簡單與單位能量密度大的特性，且在靜電致動微掃瞄鏡之中，垂直靜電式是比較可得到大角度驅動，但由於製作上既有的誤差、微小尺度流場效應以及靜電-結構耦合驅動方式，造成動態特性較難以簡單的數學模式來表示，這對傳統控制器設計是有其限制的。
故本論文為了瞭解垂直梳狀致動微掃瞄鏡相關特性，分析微掃瞄鏡之一般機械動態性質，包括慣性、阻尼與剛性。並推導V型扭轉臂之剛性，以ANSYS模擬各方向共振頻率及不同置放角度之扭轉臂對於共振頻率的影響，驗證剛性分析的正確性。在靜電力部分，利用重疊面積方式推導出單位平方電壓靜電扭矩。並使用2D(ANSYS 7.0)與3D(CoventorWare 2003)軟體模擬靜電扭矩，將其結果與重疊面積方式比較其差異。以及藉由直流、頻率及步階響應之實驗結果討論分析正確性。再針對複雜的靜電-結構耦合之非線性，以及製程誤差造成的不確定性，提出具有估測函數之適應系統，使其有較佳的暫態與穏態響應，保持控制系統的工作性能。

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