在微機電系統裡，有許多的薄膜材料都可應用於製作致動器，其中矽是最常被使用的，比金屬等材料有絕佳的機械特性。故我們提出一SOI晶片整合體型微加工技術來實現一可應用在微探針資料儲存機制的微資料碟致動器。
Trimmer與Gabriel為第一個提出以線性驅動機制來驅動微結構元件以達到大位移。本文將對此線性驅動定理做詳細的介紹，並希望能以100 V的驅動電壓使資料碟致動器達到50 □m的位移。
一個具高精準位移控制、低驅動電壓的靜電力驅動XY軸平台在本論文應用於微探針資料儲存機制，以高深寬比蝕刻技術(Deep Reactive Ion Etching, DRIE)所製作的資料碟製動器有較佳的可靠度及穩定性；要應用在微探針資料儲存機制上，首先需要有大面積平台來提供儲存資料用。本文所提出以整合體型微加工技術所製作的資料碟製動器，相信對於其他各式的高密度儲存機制是具有競爭力的。

In MEMS technology, there are many thin-film materials which can be applied to fabricate actuators. The material properties of silicon are better than those of metal. We propose a bulk-mocromachining process using the SOI (Silicon On Insulator) wafer to fabricate the micro media actuator (MMA) for the probe-based data mass storage in the thesis.
Linear surface drives were first suggested by Trimmer and Gabriel as an efficient method of achieving a large travel range describes the design and fabrication of an actuator that is intend to more 50 um at 100 V.
An electrostatic micro XY stage with a large displacement, a highly precise position control, and a low actuation voltage are essential for the Electrostatic Force Microscopy Probe-based data storage (EFMPDS) in the thesis. The proposed MMA fabricated by the high-aspect-ratio each of single crystal silicon has good performance in reliability and stability. To achieve an EFMPDS with an extremely high density, the stage with a large displacement and precise resolution is desired. We hope to accomplish the MMA successfully, and apply it in PDS application.

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