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研究生: 沈蔓庭
Shen, Man Ting
論文名稱: 利用成對指叉式電極調控交錯表面聲波研究石墨烯傳輸現象
Modulation of surface acoustic waves in graphene via two cross interdigitated transducers.
指導教授: 陳正中
Chen, Jeng Chung
口試委員: 齊正中
林大欽
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 66
中文關鍵詞: 表面聲波石墨烯
外文關鍵詞: Surface Acoustic Waves
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  • 本論文的目的是透過量測放置在鈮酸鋰基板上的石墨烯薄膜電訊號,以觀察這兩組垂直行進的表面聲波交疊所造成的變化。
    表面聲波是固體表面上所傳遞的彈性能量波,量測表面聲波與載子交互作用產生的電訊號來自於聲電效應所產生之聲電流,我們所選用的鈮酸鋰基板具有良好的壓電特性,但不帶有自由電子,而石墨烯能在不影響表面聲波傳遞的狀況下提供載子,故我們在鈮酸鋰基板上放置石墨烯以量測電訊號。
    在這篇論文當中,我們利用半導體製程製作基本的表面聲波元件,並透過化學氣相沉積法來成長單層石墨烯,並且另外在石墨烯上塗佈離子液體,透過外加閘極電壓的方式控制石墨烯的費米能階。本論文對此元件通入兩組行進方向垂直的表面聲波訊號,同時量測石墨烯樣品的聲電流訊號,並且改變其中一組表面聲波的行進方向,比較兩組數據不一樣的地方。
    實驗數據顯示同時通入兩組垂直的表面聲波訊號時,會使量測到的聲電流訊號變小,而不同的行進方向得到的衰減幅度不同,推測這樣的訊號輸入影響載子傳輸,使得聲電流訊號變小。未來將有機會透過更精密的控制,預計可以更完全的調控載子移動。


    We investigate surface acoustic wave (SAW) propagating in a graphene with tuned Fermi-level EF and the modulation of acoustic current by two SAWs generated by a cross interdigitated transducers (IDT). Our device consists of CVD-grown graphene coated with an ion-gel gate on top, and transferred on LiNbO3 substrate. Two IDTs are employed outside graphene area and are placed at a right angle to each other. Interference patterns of SAW are formed at the graphene area by applying a high frequency ac voltage to the IDTs, and EF of graphene is tuned biasing dc voltages on the ion-gel gate. We find the phase shift and SAW attenuations evolved with EF by measuring acoustic currents in graphene. Moreover, as two SAW are launched simultaneously we are able to modulate the acoustoelectronic currents, suggesting the formation of a two-dimensional ‘‘egg-carton’’ density fluctuation in graphene. Our results have a strong implications in the development of novel acoustoelectronic devices, and pave a way to study modulated 2D massless Dirac electrons.

    摘要 i Abstract ii 致謝 iii 第一章 緒論 1 1.1 實驗動機 1 1.1.1 Acoustoelectronic current 1 1.1.2 Acoustic tweezers 2 1.2 表面聲波 5 1.2.1 表面聲波在壓電材料中的傳遞 6 1.2.2 表面聲波元件基本設計原理 10 1.2.4 聲電效應 13 1.3 石墨烯簡介 16 1.3.1 晶格結構與電子能帶結構 16 1.3.2 電性特色 19 第二章 樣品設計與製作 21 2.1 樣品介紹 21 2. 2 樣品製作流程 22 2.2.1 準備樣品 22 2.2.2 清洗樣品 23 2.2.3 黃光微影 23 2.2.4 樣品蒸鍍 25 2.2.6 氧離子電漿清理 30 2.1.3 樣品封裝 32 2.2 實驗用探測棒(Probe)設計 36 第三章 實驗數據與分析 38 3.1 元件測試 38 3.1.1 表面聲波傳透訊號 38 3.1.2 石墨烯樣品檢測 43 3.1.3 聲電流量測數據 46 3.1.6 結論 50 3.2 利用成對指叉式電極調控交錯表面聲波研究石墨烯傳輸現象 51 3.2.1 實驗架設 51 3.2.2 實驗數據與討論 52 3.2.3 結論 58 第四章 總結與未來展望 59 參考文獻 61 圖目錄 63

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