本研究論文是設計與製作雙軸定位平台系統，以薄盤側推式超音波致動器為驅動器。鑒於現今傳動系統大部分採用伺服機構搭配滾珠螺桿做為定位機制，而此種定位機制存在著背隙的問題，同時製作精度的要求使價格居高不下；為了使定位精度提升、避免電磁干擾、機構易於薄形化設計及降低製作成本，採用本研究室所研發之薄盤側推式超音波致動器來直接驅動平台，搭配控制器的設計，使其具有長程移動且定位精度可達微米等級。
研究流程首先設計超音波致動器與雙軸平台的機構，對致動器的性能進行量測並設定驅動參數。接著實際量測超音波致動平台的各種動態特性，設計單一輸入的模糊控制器作為定位控制。最後整合至雙軸定位平台機電系統中，測試整體機構及定位的性能，如定位精確度的測試、平台速度、步進位移量，調整系統參數使其具有抗雜訊干擾能力，以達到精密、穩定、快速之定位目的。由本實驗結果得知，本文所使用的雙軸定位平台和單一輸入模糊控制器的設計，能使平台定位精度達0.5μm，而且本實驗室所研發的超音波致動器還具有步進馬達的功能，最小的步進位移也可達微米等級。

Design and fabricate thin-disc edge-driving ultrasonic actuators as foundation to position stage system in this research thesis. Servomechanisms with ball screws are used in most of transportation systems now. But this type of mechanism has a backlash problem in positioning system and the cost is high to demand driving elements with precise dimensions. We plan to adopt thin-disc edge-driving ultrasonic actuators developed by us as actuating elements to drive X-Y table directly for sake of promoting precision positioning, avoiding electromagnetic interference, laminating mechanism design and reducing the cost. Then long distance and micrometer precise position can be achieved within the novel mechanism via the design of robust controller.
The mechanical design of ultrasonic actuator as well as X-Y table will be verified at first in research approach. The performance of ultrasonic actuators will be measured and the driving parameters will be set well by experimentation. Then the static and dynamic features of the constructed X-Y table will be measured and analyzed. Design single-input fuzzy logic controller as orienting control. Finally, combine it in double axles orient the electromechanical system of the stage and test the whole organization and performance of orientation, such as orienting test, speed of stage, step displacement. It makes it resist the disturbance to adjust the system parameter in order to possess the abilities of precision, stability and fast positioning. By this experimental result, using the double axles orienting stage and single-input fuzzy logic control can make the precision of oriented reach 0.5μm. As well as the ultrasonic actuators have capability as step motor, and its minimum step displacement can reach several micro of grades.

[1] R. Carotenuto, N. Lamberti, A. Iula, and M. Pappalardo “A New Low Voltage Piezoelectric Micromotor Based on Stator Precessional Motion, ”IEEE Trans. Ultrason.,Ferroelect., Freq., Contr., vol. 45, no. 5, pp. 1427–1434, Sept. 1998.
[2] S. He, W. Chen, X. Tao, and Z. Chen “Standing Wave Bi-direction LinearlyMoving Ultrasonic Motor, ” IEEE Trans. Ultrason., Ferroelect., Freq.,Contr., vol. 45, no. 5, pp. 1133–1138, Sept. 1998.
[3] A. Kanai, H. Sano, J. Yoshioka, and M. Miyashita, “Positioning of a 200
kgCarriage on Plain Bearing Guideways to Nanometer Accuracy with a
Force-operated Linear Actuator, ” Nanotechnology, Vol. 2, pp. 43-51, 1991.
[4] Takehiko Nomura and Ryouichi Suzuki, “Six-axis Controlled Nanometer-order Positioning Stage for Microfabrication, ” Nanotechnology, Vol. 3, pp. 21-28,1992.
[5] L. A. Zadeh, “Fuzzy sets, ” Information and Control, Vol. 8, pp. 338-353, 1965.
[6]T. Sashida, and T. Kenjo, “An Introduction to Ultrasonic Motors, ” Clarendon
Press-Oxford, 1993.
[7] M. Goldfarb, and N. Celanovic, “Modeling Piezoelectric Stack Actuators for Control of Micromanipulation,” IEEE Transactions on Control Systems, June 1997.
[8]Byung-Jae Choi, Seong-Woo Kwak, and Byung Kook Kim, “Design and Stability Analysis of Single-Input Fuzzy Logic Controller, ”IEEE Transations On System, Man, And Cybernetics-Part B:Cybernetics,vol.30,No.2,2000.
[9]M. Kinouchi, I. Hayashi, N. Iwatsuki, K. Morikawa, J.Shibata, and K. Suzuki, “Application of Fuzzy PI Control to Improve the Positioning Accuracy of a Rotary-linear Motor Driven by Two-dimensional Ultrasonic Actuators, ” ELSEVIER Microprocessors and Microsystems , vol. 24, pp.105-112, 2000.
[10] H.V. Barth, “Ultrasonic driven motor, ” IBM Technical Disclosure Bulletin, 16, 2263,1973.
[11] S. Ueha, and M. Kurosawa, “Ultrasonic motors, ” Proceedings of IEEE Ultrasonics Symposium, Vol. 1, pp. 519-522, 1988.
[12]M. J. Patyra, J. L. Grantner, and K. Koster, “Digital fuzzy logic controller: Design and implementation, ” IEEE Trans. on Fuzzy Systems, vol. 4, no. 4, pp. 439-459, 1996.
[13] B. D. Liu, and C. Y. Huang, “Design and implementation of the tree-based fuzzy logic controller, ”. IEEE Trans. on Systems, Man, and Cybernetics, vol. 27, no. 3, pp. 475-587, 1997.
[15]桂豫晟，超音波致動器之設計分析與量測，國立清華大學，動力機械研究所，碩士論文，1998年。
[16]郭榮芳，側推式超音波馬達設計與測試，國立清華大學，工程與系統科學研究所，碩士論文，2000年。
[17]陳明泰，以單晶片為控制基礎的新型壓電致動平台研製，國立清華大學，工
程與系統科學研究所，碩士論文，2000年。
[18]葉俊余，薄片型超音波致動器之設計與模擬，國立清華大學，工程與系統科
學研究所，碩士論文，2000年。
[19]李政漢，側推式超音波馬達特性量測與應用，國立清華大學，工程與系統科學研究所，碩士論文，2001年。
[20]林志和，超音波平台之控制系統設計與測試，國立清華大學，工程與系統科學所，碩士論文，2002年。
[21] 張所鋐和簡宏彰，三自由度超精密微定位平台之研究，國立台灣大學，機械工程學研究所，碩士論文，1996年。
[22] 吳朗，電子陶瓷-壓電，全欣科技圖書，1994。
[23] 孫宗瀛、楊英魁，Fuzzy控制:理論、實作與應用，全華科技圖書，1997。[24] 許溢适 壓電陶瓷新技術，文笙書局，台北市，1996年。
[25] 許溢适，壓電/電歪致動器，文笙書局，台北市，1996年。
[26]楊英魁，Fuzzy理論與應用實務，全華科技圖書，1992年。
[27]A. E. Glazounov, S. Wang, Q. M. Zhang, Senior Member, IEEE, and C. Kim, “Piezoelectric Stepper Motor with Direct Coupling Mechanism to Achieve High Effciency and Precise Control of Motion, ” IEEE Transations on Ultrasonics, Freeoelectrics, And Frequency Control, Vol. 47, No. 4, July 2000.
[28]C. Y. Won, D. H. Kim, S. C. Kim, and D. W. Yoo, “Position Control of Induction Motor with a New Fuzzy-sliding Mode Controller, ” PCC-Yokohama, 1993.