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研究生： 鐘金峰
Chin-Feng Chung
論文名稱： 化學液相法製備BiFeO3氧化物薄膜
Preparation of BiFeO3 thin films by chemical solution deposition method
指導教授： 吳振名
Jenn-Ming Wu
口試委員:
學位類別： 碩士
Master
系所名稱： 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年： 2006
畢業學年度： 94
語文別： 中文
論文頁數： 136
中文關鍵詞： 複鐵式 、鐵電性 、磁電 、鐵酸鉍
外文關鍵詞： Multiferroic, Ferroelectric, Magnetoelectric, Bismuth Ferrite
相關次數： 點閱：3  下載：0 
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    • (BiFeO3，BFO)薄膜是目前很熱門的研究。但不幸地，受限於材料的漏電流太大，還無法在鐵電的應用上受到重視，文獻中提供了目前很多研究的方向，本論文是利用化學液相沈積法（chemical solution deposition，CSD）旋鍍鐵酸鉍氧化物（BFO）薄膜，文中探討分別藉由摻雜三價錳（Mn）離子和五價鈮（Nb）離子去取代BFO薄膜中部分三價鐵離子、藉由不同價數的取代去改善BFO薄膜的性質。本文分成四個方面來論述，首先，如何在Pt/Ti/SiO2/Si基板上製備BFO薄膜藉由改變不同熱處理溫度來探討其結構上和電性方面的影響，第二部分摻雜不同比例的三價錳離子取代鐵離子，在BiFe1-xMnxO3薄膜中分別取x=0.02、0.05、0.1成分和純BFO薄膜相互比較其在不同溫度熱處理下的電性影響，第三部分藉由高價的鈮（Nb）離子去取代BFO薄膜中的5%鐵離子形成BiFe0.95Mn0.05O3薄膜，在相同摻雜量的情形下，去比較不同離子在BFO薄膜的影響。最後利用射頻磁控濺鍍法在Pt基板上鍍覆LaNiO3（LNO）緩衝層，希望藉由LNO來降低結晶溫度，幫助BFO薄膜成相，同時探討BFO結晶程度對鐵電薄膜性質的影響。最後除了利用溶液法製備出優良的BFO薄膜外，對薄膜的各項特性進行分析，包括XRD結構鑑定、SEM表面微結構分析、電特性分析、磁特性等等。
    透過CSD製備的BFO薄膜，在氧氣氛下經過500oC熱處理可以的到最佳的漏電流密度（約10-6A/cm2於電場70kV/cm），透過添加錳(Mn)離子，隨著錳離子的摻雜量越多，漏電流遽增，介電常數增加。隨著BFO薄膜熱處理溫度的上升，添加鈮（Nb）離子可以改善漏電流密度，有別於純BFO薄膜，高價離子的添加幫助BFO薄膜減少氧空缺，使得漏電流較穩定。在室溫下，BFO薄膜的磁滯曲線，可藉由鈮（Nb）離子摻雜得到鐵磁特性。最後LNO緩衝層的存在，造成薄膜晶粒縮小，微觀結構更加緻密，減少與基板的直接反應，對於薄膜電性有增進的效果，另外還可以降低熱處理的結晶溫度，使其低溫下具有較好的電性。

    The BiFeO3 (BFO) thin films have been recognized as the potential dielectric materials of DRAM. Unfortunately, the leakage current is too large for apply. There are three works in my researches, the first of this work added the Mn content to the multi-doped BiFeO3 to form three kinds of compositions with different Mn ratios of 0, 2%, 5%, and 10%. The purpose of this work is to reduce the leakage current of BFO thin films with high permittivity by spin coating. The research of Mn-added multi-doped BiFeO3 thin films was focused on the XRD structure analysis, microstructure, and dielectric and electric properties and magnetic properties. The Mn-added multi-doped were prepared for studying the effect of annealing temperature on dielectric properties and resistivity. Second, I doped high value ions Nb to reduce the leakage current of BFO films on Pt substrate, realized difference of different ions doped in BFO films. Finally I change different substrates to improve BFO properties Using LaNiO3 substrate to help BFO transform perovskite phase and lower crystalline temperature.

    摘要.......................................................I 目錄.....................................................III 表目錄..................................................VIII 圖目錄....................................................IX 第一章 前言..............................................1 1.1 簡介...............................................1 1.2 研究動機 ..........................................2 第二章 文獻回顧..........................................4 2.1 簡介複鐵式材料（Multi-ferro Materials）............4 2.1.1 鐵電性質......................................4 2.1.2 複鐵式性質（Multi-ferro properties）..........7 2.1.3 複鐵式材料（Multi-ferro materials）..........11 2.2 鐵酸鉍的特性（BiFeO3）............................13 2.2.1 晶格結構.....................................13 2.2.2 優點.........................................14 2.2.3 缺點.........................................15 2.3 BFO薄膜的製作與發展...............................16 2.4 介電性質..........................................19 2.4.1 極化機制（Polarization Mechanisms）..........19 2.4.2 介電常數和散逸因子...........................20 2.4.3 介電崩潰機制.................................21 2.4.4 漏電流機制...................................21 2.4.5 電極.........................................23 2.5 化學溶液沈積法 (CSD) .............................24 第三章 實驗方法.........................................34 3.1 實驗流程 .........................................34 3.1.1 基板之準備...................................34 3.1.2 Bi1.05FeO3(BFO)溶液的製備....................35 3.1.3 薄膜的旋鍍及熱處理...........................36 3.1.4 上電極的鍍製.................................37 3.2 實驗量測..........................................38 3.2.1 晶相結構.....................................38 3.2.2 薄膜厚度和表面結構...........................38 3.2.3 化學鍵結分析.................................38 3.2.4 薄膜成分縱深分析.............................39 3.2.5 介電常數及散逸因子...........................39 3.2.6 外加電場(E)對薄膜內部電流密度(J)之影響.......39 3.2.7 P-E 電滯曲線.................................40 3.2.8 M-H 磁滯曲線.................................40 第四章 結果討論.........................................47 4.1 BiFeO3/Pt 之薄膜性質..............................47 4.1.1 晶體結構.....................................47 4.1.2 微觀結構.....................................48 4.1.3 化學鍵結.....................................48 4.1.4 薄膜成分縱深分析.............................49 4.1.5 介電常數及散逸因子...........................49 4.1.6 漏電流性質...................................50 4.1.7 鐵電性.......................................51 4.1.8 磁滯曲線.....................................52 4.2 不同錳摻雜量對於BFO的影響.........................52 4.2.1 晶體結構.....................................53 4.2.2 微觀結構.....................................53 4.2.3 化學鍵結.....................................54 4.2.4 介電常數及散逸因子...........................55 4.2.5 漏電流性質...................................56 4.2.6 鐵電性.......................................56 4.2.7 磁滯曲線.....................................56 4.3 不同摻雜離子對於BFO的影響.........................57 4.3.1 晶體結構.....................................57 4.3.2 微觀結構.....................................57 4.3.3 化學鍵結.....................................58 4.3.4 介電常數及散逸因子...........................58 4.3.5 漏電流性質...................................59 4.3.6 鐵電性.......................................60 4.3.7 磁滯曲線.....................................61 4.4 LNO緩衝層對於BFO的影響............................61 4.4.1 晶體結構.....................................61 4.4.2 微觀結構.....................................62 4.4.3 薄膜成分縱深分析.............................62 4.4.4 介電常數及散逸因子...........................62 4.4.5 漏電流性質...................................63 4.4.6 鐵電性.......................................64 4.4.7 磁滯曲線.....................................64 第五章 結論.............................................65 第六章 參考文獻........................................120 附錄............................................135

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