本研究的目的為探討氮化鈦過渡層以及鈦介層在氮化鈦鋯/氮化鈦/鈦三層鍍膜中，其對於應力釋放以及磨潤性質所扮演的角色。主要控制參數為改變氮化鈦過渡層的厚度，分別從200到400奈米。試片以非平衡磁控濺鍍法在AISI D2工具鋼上鍍製氮化鈦鋯鍍層，實驗試片共分為三系列，分別為: 單層氮化鈦鋯、雙層氮化鈦鋯/鈦以及氮化鈦鋯/氮化鈦/鈦三層膜。研究中薄膜的氮和金屬比例介於0.9到1.0之間，且鈦和鋯的比例約相等。上層氮化鈦鋯鍍層的硬度介於28.1到31.9 GPa之間，當添加過渡層時硬度稍微下降。添加鈦介層以及氮化鈦過渡層會釋放上層氮化鈦鋯鍍層的殘留應力，釋放量隨過渡層厚度的上升而增加。添加氮化鈦過渡層亦改善鍍層與基材間的附著力，改善幅度隨過渡層厚度上升而增加。氮化鈦鋯鍍層也因為添加了氮化鈦過渡層而改善了磨耗率。從實驗結果發現，磨耗率與鍍層的彈性儲存能(Gs)相關，當鍍層中的彈性儲存能增加時，由於彈性儲存能接近破裂韌性(Gc)，導致所能吸收外界施加的能量減少。在磨耗過程中，因為彈性儲存能大小不同，進而影響材料的耐磨性，因此，可以透過彈性儲存能的變化來做為預測鍍層耐磨性的指標。

The objectives of this study were to investigate the role of TiN transitional layer and Ti interlayer in the tribological behavior of tri-layer TiZrN/TiN/Ti coatings and explore the mechanism of stress relief in the tri-layer coatings. TiZrN coatings were deposited on AISI D2 steel by DC unbalanced magnetron sputtering. There were three series of samples, including single layer TiZrN (S), TiZN/Ti (B), and TiZrN/TiN/Ti (Tx) in this study. The TiN thickness of Tx-series specimens ranged from 200 to 400 nm. The N/(Ti+Zr) ratios of TiZrN layer ranged from 0.9 to 1.0 and the Zr/(Zr+Ti) ratios of TiZrN coating were about 0.5. The hardness of the specimens ranged from 28.1 to 31.9 GPa which slightly decreased by introducing TiN transitional layer. The residual stress of TiZrN layer ranged from -8.56 to -3.28 GPa, decreasing with increasing thickness of interlayer and transitional layer. Lc2 critical loads of all specimens range from 63.2 to 88.6 N. The TiN transitional layer could improve the adhesion strength, and the Lc2 increased as the thickness of transitional layer increased. The wear rate of the tri-layer coatings was lower than that of TiZrN single layer and bilayer coatings. The results indicated that introducing the interlayer and transitional layer could enhance the wear resistance. The wear rate almost linearly increased with increasing stored energy (Gs). The increase of Gs may decrease the capacity in absorbing the external input energy and thereby decreasing the wear resistance. Therefore, Gs could be taken as an index to evaluate the wear resistance of coatings.

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