本論文針對在光學微系統中相當重要的元件-微光學掃瞄鏡面做一完整的研究。利用微光學鏡面，可以應用在光通訊產業中，像是光開關（Optical Switch）、光遮斷器（Optical Chopper）或是在其他領域諸如光譜學（Optical Spectroscopy）、生醫影像（Biomedical Imaging）、掃描器（Scanner、Barcode Scanner）、雷射印表機（Laser Printers）等，應用範圍相當廣泛，是目前相當受到重視的一個研究方向。
近年來在世界各地有相當多的研究團對在進行相關的研究，但當微光學鏡面漸漸商品化的過程中，對於鏡面成本的控制與性能的要求越來越高，因此如何製作一個低成本、高轉角的鏡面成為本論文研究的主題。在本論文中，我們利用<110>的矽晶圓在非等向性蝕刻液中會出現垂直晶格面的特性，製作垂直梳狀製動器，利用濕蝕刻的方式可以有效降低製作的成本，在製程的重複性（Repeatability）上也會比較好的表現。另外我們使用硼擴散（Boron Diffuse）的製程方式，製作V型彈簧（V-Shape Spring）做為我們的致動彈簧，這樣可以有效的增加轉動角度，並同時防止側向吸附（Side Stiction）的現象，使可以在更高的驅動電壓下穩定轉動。同時，此碩士研究延伸研究主題，以類似相同的製程，在微鏡面上做出光柵（Grating）的結構進行分析及設計，進一步增加元件的應用範疇。
本論文已成功完成微鏡面的設計、製程、模擬以及性能測試，並驗證該低成本、高轉角鏡面的可行性，在光柵的部分，也已經完成光柵的設計及一部份的製程，本論文報告光柵的設計及微機電製程技術製作完成的成果。

Micro scanning mirrors developed by Microsystem technology have been widely developed because of the widespread applications in displays, optical switches, interferometric system, optical spectroscopy and biomedical imaging. There has been increasing interest recently in micro scanning mirrors actuated by the vertical comb-drive actuators due to the advantages of low power consumption, high speed actuation, compact size and low cost from the batch fabrication.
Quite a few groups have studied the micro scanning mirror actuated by vertical comb actuators. However, based on the marketing concern, the control of the fabrication cost and the requirement of the performance are getting more important. A low cost but still with high performance, a large scanning angle, microsystem mirror is essential. In this research, we used <110> wafer and fabricate the vertical comb actuators via wet etching process to approach the goal of cost down. A boron diffused process was utilized to fabricate the V-shape spring which can improves the scanning angle and prevent the side stiction phenomenon effectively. In addition, a grating on mirror structure was also studied in this thesis to broaden the applications.
We have done the design, fabrication process, theoretical analysis, numerical simulation, including the generated torque and the V-shape spring, and the experimental performance measurements for the microsystem mirror in this research. We also verified the feasibility of the low cost and high performance scanning mirror. The optimal design and some preliminary fabrication of the grating have been done and reported in this thesis.

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