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研究生: 鄭博尹
Cheng, Po-Yin
論文名稱: 微波電漿化學氣相沉積法成長奈米碳管於微波加熱之升溫影響研究
Study on the microwave heating effect of carbon nanotubes fabricated by MPCVD
指導教授: 蔡宏營
Tsai, Hung-Yin
口試委員: 葉孟考
Yeh, Meng-Kao
曾仕君
Tseng, Shih-Chun
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2018
畢業學年度: 106
語文別: 中文
論文頁數: 85
中文關鍵詞: 奈米碳管微波加熱升溫曲線微波電漿化學氣相沉積法九水硝酸鐵
外文關鍵詞: Microwave induced-heating, Temperature curves, Microwave plasma chemical vapor deposition, Fe(NO3)3·9H2O
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  • 本研究的目的是探討奈米碳管在微波照射下的升溫表現,利用微波非接觸式與選擇性加熱的優勢,使奈米碳管吸收微波升溫成為熱源,快速且均勻地加熱目標物。利用最佳升溫表現的奈米碳管與其他碳材料比較並可應用於生技試驗、記憶材料熱致動變形。
    本研究使用普及的市售微波爐結合波導管作為微波來源裝置,藉由安裝波導管將微波均勻地傳遞至奈米碳管試片上,設計載台使試片位置固定並貼近波導管出口,並減少微波能量從磁控管到試片表面上的散失。透過微波加熱裝置以及紅外線測溫儀檢測奈米碳管在微波照射下之升溫表現。
    藉由控制製程參數來製備奈米碳管試片,以N2:H2:CH4 = 40:50:20 (sccm)的氣體參數來成長奈米碳管,調整觸媒濃度(Fe(NO3)3·9H2O)、成長時間以及不同電漿處理方式來進行升溫曲線的比較。以掃描式電子顯微鏡、拉曼光譜儀、導電原子力顯微鏡分析奈米碳管結構與性質,搭配升溫曲線探討吸收微波後之升溫效果。
    本研究中塗佈30 wt% Fe(NO3)3·9H2O的觸媒成長30分鐘之奈米碳管試片,可於微波5秒後,試片溫度上升至117度,並且具備反覆冷卻加熱的能力,呈現出優異的吸收微波快速升溫特性。


    This study investigates the effect of microwave irradiation on the heating of carbon nanotubes grown by microwave plasma chemical vapor deposition (MPCVD). Taking the advantages of microwaves as a non-contact and selective heating source, this method allows to transform the carbon nanotubes into heating source themselves. In turn, they also can be used to heat other materials quickly and uniformly.
    This study uses a commercially available microwave oven as a microwave heating device. The waveguide was designed to transmit microwaves uniformly to carbon nanotubes, and the loss of microwave energy transmitted from the magnetron to the surface of the sample was reduced. Temperature of carbon nanotubes after heating by microwave heating device with different time was measured by infrared thermometer.
    Carbon nanotubes were prepared by MPCVD process using N2/H2/CH4 plasma with flow rates of 40 sccm, 50 sccm, 20 sccm, respectively and Fe as catalyst. The following parameters such as catalyst concentration and growth time were adjusted for comparison of temperature curves. In addition, plasma treatment with various gases and times was applied on samples. Scanning electron microscopy, Raman spectroscopy, and conductive atomic force microscopy were used to analyze the structure and properties of carbon nanotubes.
    It was discovered that the best heating characteristics of carbon nanotubes was achieved for the sample grown with 30 wt% of iron(III) nitrate nonahydrate catalyst for 30 minutes. After 5 seconds under microwave irradiation, it reached 117 ℃ which could be achieved again after several cooling and heating steps.

    目錄 摘要 I Abstract II 致謝 III 目錄 VII 圖目錄 XI 表目錄 XVI 第一章 緒論 1 1.1 前言 1 1.2 研究動機 1 第二章 文獻回顧 3 2.1 微波加熱原理 3 2.1.1 微波(Microwave) 3 2.1.2 微波加熱 3 2.1.3 微波吸收材料 4 2.1.4 微波加熱特色 4 2.2 奈米碳管 5 2.2.1 奈米碳管簡介 5 2.2.2 奈米碳管製備方式 7 2.3 奈米碳管微波吸收特性 11 2.4 奈米碳管於微波之應用 11 第三章 研究方法 14 3.1 實驗設計 14 3.2 實驗製程步驟 17 3.2.1 試片清潔 17 3.2.2 製備觸媒 17 3.2.3 旋轉塗佈觸媒 17 3.2.4 成長奈米碳管 18 3.3 微波加熱裝置設計 18 3.3.1 微波爐 18 3.3.2 波導管 19 3.3.3 聚丙烯載台 21 3.3.4 壓克力基座 21 3.3.5 計秒定時器 23 3.4 實驗材料與儀器 24 3.4.1 鐵氟龍容器與隔熱棉 24 3.4.2 紅外線測溫儀 24 3.4.3 超音波震盪機 25 3.4.4 微波電漿化學氣相沉積系統 26 3.4.5 掃描式電子顯微鏡 27 3.4.6 拉曼光譜分析儀(Raman spectrometer) 28 3.4.7 導電原子力顯微鏡(Conductive atomic force microscopy) 30 3.5 實驗藥品與氣體 31 第四章 研究結果與討論 32 4.1 微波能量實驗 32 4.2 製程參數對奈米碳管之升溫表現 37 4.2.1 不同成長時間與觸媒濃度之奈米碳管 38 4.2.2 微波照射下之升溫曲線 46 4.2.3 微波加熱之升溫表現分析 59 4.3 奈米碳管之電漿處理 64 4.3.1 奈米碳管之表面形貌 64 4.3.2 電漿處理後之升溫表現分析 67 4.3.3 奈米碳管之散熱特性 76 第五章 結論與未來展望 81 5.1 結論 81 5.2 未來展望 82 參考文獻 83

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