研究生: |
鄭博尹 Cheng, Po-Yin |
---|---|
論文名稱: |
微波電漿化學氣相沉積法成長奈米碳管於微波加熱之升溫影響研究 Study on the microwave heating effect of carbon nanotubes fabricated by MPCVD |
指導教授: |
蔡宏營
Tsai, Hung-Yin |
口試委員: |
葉孟考
Yeh, Meng-Kao 曾仕君 Tseng, Shih-Chun |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 動力機械工程學系 Department of Power Mechanical Engineering |
論文出版年: | 2018 |
畢業學年度: | 106 |
語文別: | 中文 |
論文頁數: | 85 |
中文關鍵詞: | 奈米碳管 、微波加熱升溫曲線 、微波電漿化學氣相沉積法 、九水硝酸鐵 |
外文關鍵詞: | Microwave induced-heating, Temperature curves, Microwave plasma chemical vapor deposition, Fe(NO3)3·9H2O |
相關次數: | 點閱:2 下載:0 |
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本研究的目的是探討奈米碳管在微波照射下的升溫表現,利用微波非接觸式與選擇性加熱的優勢,使奈米碳管吸收微波升溫成為熱源,快速且均勻地加熱目標物。利用最佳升溫表現的奈米碳管與其他碳材料比較並可應用於生技試驗、記憶材料熱致動變形。
本研究使用普及的市售微波爐結合波導管作為微波來源裝置,藉由安裝波導管將微波均勻地傳遞至奈米碳管試片上,設計載台使試片位置固定並貼近波導管出口,並減少微波能量從磁控管到試片表面上的散失。透過微波加熱裝置以及紅外線測溫儀檢測奈米碳管在微波照射下之升溫表現。
藉由控制製程參數來製備奈米碳管試片,以N2:H2:CH4 = 40:50:20 (sccm)的氣體參數來成長奈米碳管,調整觸媒濃度(Fe(NO3)3·9H2O)、成長時間以及不同電漿處理方式來進行升溫曲線的比較。以掃描式電子顯微鏡、拉曼光譜儀、導電原子力顯微鏡分析奈米碳管結構與性質,搭配升溫曲線探討吸收微波後之升溫效果。
本研究中塗佈30 wt% Fe(NO3)3·9H2O的觸媒成長30分鐘之奈米碳管試片,可於微波5秒後,試片溫度上升至117度,並且具備反覆冷卻加熱的能力,呈現出優異的吸收微波快速升溫特性。
This study investigates the effect of microwave irradiation on the heating of carbon nanotubes grown by microwave plasma chemical vapor deposition (MPCVD). Taking the advantages of microwaves as a non-contact and selective heating source, this method allows to transform the carbon nanotubes into heating source themselves. In turn, they also can be used to heat other materials quickly and uniformly.
This study uses a commercially available microwave oven as a microwave heating device. The waveguide was designed to transmit microwaves uniformly to carbon nanotubes, and the loss of microwave energy transmitted from the magnetron to the surface of the sample was reduced. Temperature of carbon nanotubes after heating by microwave heating device with different time was measured by infrared thermometer.
Carbon nanotubes were prepared by MPCVD process using N2/H2/CH4 plasma with flow rates of 40 sccm, 50 sccm, 20 sccm, respectively and Fe as catalyst. The following parameters such as catalyst concentration and growth time were adjusted for comparison of temperature curves. In addition, plasma treatment with various gases and times was applied on samples. Scanning electron microscopy, Raman spectroscopy, and conductive atomic force microscopy were used to analyze the structure and properties of carbon nanotubes.
It was discovered that the best heating characteristics of carbon nanotubes was achieved for the sample grown with 30 wt% of iron(III) nitrate nonahydrate catalyst for 30 minutes. After 5 seconds under microwave irradiation, it reached 117 ℃ which could be achieved again after several cooling and heating steps.
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