摘要
本研究主要以半導體300mm(12吋)晶圓製造廠黃光區之自動化物料搬運系統(Automated Material Handling System，簡稱AMHS)為主要研究對象。本研究以物件導向模擬軟體eMPlant建構一個intrabay系統內含三個intrabay系統的複雜自動化物料搬運系統。在建構大型系統之前，必須以一套有效的方法，郭(1999)所整理出來的統一模式化語言(Unified Modeling Language, UML)，依此方法進行系統行為的分析、設計、構建，並探討自動化物料搬運系統在管理方面的重要性。
晶圓廠之自動化物料搬運系統的運作和彈性製造系統無人搬運車的運作模式並不相同。但過去的文獻對於自動化物料搬運車數計算仍然還是採用無人搬運車數計算方法，導致自動化物料搬運車數精準度的問題產生。本研究主要是依據真實晶圓廠系統運作及考量真實細節做模擬模式建構，將無人搬運車所算出來之車數輸入到模擬模式以進行模擬實驗分析，驗証無人搬運車是否可合乎且適用於自動化物料搬運車之搬運。
首先，本研究將列出自動化物料搬運系統與無人搬運車系統之差異；次之，本研究將延續張(2003)之黃光區模擬環境架構下，再更細緻化將其生產與搬運行為劃分，拆解成晶舟、搬運車、機台三主關係。將生產派工法則與搬運派車法則將表現出晶舟、搬運車及機台之相互實際運作狀況，再以模擬手法建構出來。
另外，本研究將藉由黃光區系統模擬的回饋特性及實驗設計分析手法，規劃出以無人搬運車計算車數為基，找出合適黃光區生產與搬運系統之自動化物料搬運車車數。結果在本研究之黃光區系統發現，若要滿足本研究之黃光區Intrabay系統，其自動化物料搬運系統所需要之車數會比無人搬運所計算出之車數計算出之車數還要多。在既定之環境因子決定之下，即可找出對於本黃光區Intrabay之系統中最佳的派工法則及派車法則之組合，讓整體黃光區之系統生產績效、晶舟搬運績效及搬運車績效達最佳。

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