本篇論文描述了低成本輕巧的單極天線之研究成果，包含兩種微機電單極天線的設計、製作與性能的量測結果。其中一種是製作於parylene薄膜上之可撓性單極天線，另一種是製作於Pyrex 7740玻璃基板兩側之三維立體單極天線。
可撓性雙頻單極天線被設計成曲折狀的金屬線，因此可縮小天線之物理尺寸並同時維持其電性長度。因parylene之低介電常數、高電阻係數與化性安定等等之優點，本實驗採用parylene薄膜做為天線之基板。根據實驗與量測結果，此天線具有小尺寸、重量輕、具可撓性、低成本、雙頻特性與寬頻等等優點。
小型的微機電立體單極天線亦成功地 被設計與製作出來，以適用於無線區域網路（802.11b）之應用。為了縮小尺寸，此天線製作在Pyrex 7740玻璃基板之兩側，兩側之金屬線以電鍍銅連接孔連結。由量測結果可發現，此天線之操作頻率為2.45GHz並具有190MHz之頻寬，此外，量測結果與模擬結果有相當程度之吻合。此小尺寸、低成本與容易製作之立體天線亦適合於無線通訊系統之應用。

This dissertation reports the design and fabrication of two kinds of micromachined monopole antennas; one is a flexible monopole antenna which was fabricated on parylene substrate, and the other is a 3D monopole antenna which was fabricated on both sides of a Pyrex 7740 glass wafer with through-hole connections.
Flexible dual-band monopole antennas were designed with meander-shaped metal tracks, because this can efficiently reduce the physical dimensions of the overall antenna size and maintaining the required electrical path-length. Due to parylene’s excellent physical, mechanical and chemical properties such as low dielectric constant, high resistivity, and inertness to chemicals, it can serve as a substrate for an antenna in our study. The advantages of these antennas are their small size, light weight, low cost, dual-band characteristics, broad bandwidth, and flexible.
A compact three dimensional MEMS monopole antenna for WLAN (802.11b) was also designed, fabricated, and measured. In order to reduce the size, the meandered monopole antenna was fabricated on both sides of a Pyrex 7740 glass wafer, and the metal lines on both sides were connected through via-holes. Measured performances of the fabricated 3-D antenna are in good agreement to the designed values in terms of operating frequency at 2.45 GHz and with a bandwidth of 190 MHz. This simple fabricated small size low cost antenna is suitable for mobile communication systems applications.

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