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研究生： 莊子漢
Chuang, Tzu-Han
論文名稱： 三維X光自由曲面微加工系統研發
The development of three-dimensional x-ray free-form micromachining system
指導教授： 雷衛台
Lei, Wei-Tai
傅建中
Fu, Chien-Chung
口試委員: 雷衛台
傅建中
潘榮隆
曾繁根
周敏傑
陳秀香
學位類別： 博士
Doctor
系所名稱： 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年： 2012
畢業學年度： 100
語文別： 中文
論文頁數： 119
中文關鍵詞： 3D微加工 、X光微影 、光刻模造成型技術 、奈米壓電平台 、運動補償
外文關鍵詞： 3D micromachining, x-ray lithography, LIGA, nano PZT stage, motion compensation
相關次數： 點閱：4  下載：0 
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    • 本研究發展建構一套三維X光自由曲面微加工系統，此系統基於移動光罩加工的原理，再加進CNC工具機的概念，將光罩視為一把"光刀"，藉由光刀的移動，在任意指定位置曝光指定的時間，如此可將傳統X光微影技術由2.5D的加工，擴展成真正3D任意形狀的加工。
    X光3D加工系統的硬體已建構完成，控制系統與模擬程式也已完成 。構建的3D加工系統為一光罩固定/光阻材料運動之系統，搭配兩軸奈米壓電平台，運動解析度可達1.5奈米，運動行程達200微米。運動控制系統驅動二維運動平台並決定單點曝光劑量與Z方向的加工深度。相關的運動誤差經由補償校正後，實際運動與指定運動的誤差小於1.3 %。
    完成加工平台的建構與顯影相關研究後，本研究進行正向加工與逆向加工來驗證系統的加工正確性與可能性，在正向加工方面，給予平台指定的運動路徑與運動速度，配合模擬程式計算出劑量分佈，再經由顯影資料庫將計算的曝光劑量轉換成實際的加工深度，並實際進行加工，比對實際加工結果與模擬結果，驗證正向加工各環節的正確性；在逆向加工方面，載入欲加工的設計結構，經由顯影資料庫反推得理論上的劑量分佈，並由路徑計算程式計算可能的加工路徑，接著進行正向加工程序將結構加工出來，並與原始設計結構進行比對。
    正向加工實驗成功加工各式各樣的3D微結構，加工結構的最大深度從2.7到19.6微米，實際加工結果與模擬結果的整體平均誤差率為7.4 %，表面粗糙度在40奈米以下。在逆向加工方面，方底圓透鏡結構已成功加工，結構深度的平均計算誤差為9.68 %，實際加工結構與設計結構的誤差率為12.79 %。應用於膜蛋白研究之3D複合漸進式微結構也已加工完成，相關的3D簍空懸浮加工技術已經建立，加工結果說明了本文的加工系統與其他X光微影製程結合的可能性。

    This dissertation presents a novel x-ray machining system for the fabrication of three-dimensional microstructures with free-form surfaces. The structures with different sizes and various shapes can be created by a single mask combining with a moving x-ray resist along several precise paths. By adjusting the coefficients of motion such as path types, overlaps and velocities, various microstructures with specific complex features have been successfully fabricated with simple geometric patterns of the mask.
    The x-ray free-form micromachining system consists of a high performance piezoelectrical nano-stage with 1.5 nm resolution and a stroke up to 200 μm. The error of motion is controlled below 1.3 %. Pertinent systematic studies on the lithography apparatus, the fundamental properties of PMMA and the simulation for 3D structuring are undertaken to further clarify the validity of the system. Various 3D PMMA microstructures have been successfully fabricated as a demonstration of the proposed method. The finishing structures have specific characteristics such as axial symmetries and free-form surfaces with the maximum depths varying from 2.7 to 19.6 μm. The average error rate between simulations and experiments is 7.4 % approximately. The average surface roughness is controlled below 40 nm. The result suggests that the circular pattern is superior to the square one for the fabrication in view of good surface roughness
    The new technique of fabricating 3D gradually thinning holes on a suspended film has successfully manufactured a suspended film with the thickness of 2.5 μm. The 3D hybrid structures with dimensions of 0~1.0, 1.2, 1.7 μm are also built.

    中文摘要 I ABSTRACT II 誌謝 III 目錄 IV 圖目錄 VIII 表目錄 XII 符號說明 XIII 1. 前言 1 1.1 研究目的 3 1.2 本文架構 5 2. 文獻回顧 6 2.1 三維微影技術發展 6 2.1.1 傾斜式微影法 7 2.1.2 轉動式微影法 8 2.1.3 多層式微影法 9 2.1.4 複合式微影法 10 2.1.5 背曝式微影法 11 2.1.6 灰階光罩微影法 11 2.1.7 移動光罩微影法 13 2.1.8 本節小結 16 2.2 X光微影機制 16 2.2.1 曝光劑量 17 2.2.2 顯影速率 20 2.2.3 本節小結 21 2.3 X光微影誤差 22 2.3.1 機構誤差 22 2.3.2 光束誤差 22 2.3.3 顯影誤差 24 2.3.4 本節小結 26 3. 實驗設備 28 3.1 X光微影光束線(NSRRC BL19A) 28 3.1.1 簡介 28 3.1.2 鏡組掃描機構 30 3.2 三維X光自由曲面微加工系統 32 3.2.1 硬體設計 33 3.2.2 運動控制 36 3.2.3 運動補償 39 3.2.4 量測與校正 44 3.3 X光光罩 44 3.3.1 光罩製程 45 3.3.2 光罩製作結果 47 3.3.3 熱膨脹誤差 49 3.4 本章小結 50 4. 模擬系統 51 4.1 系統概述 51 4.1.1 理論模型 51 4.1.2 顯影深度資料庫 55 4.1.3 模擬流程 57 4.2 模擬結果與討論 58 4.2.1 加工深度與移動速度 58 4.2.2 剖面輪廓與路徑重疊量 59 4.2.3 門檻劑量 59 4.3 本章小結 60 5. 正向加工實驗 61 5.1 實驗流程 61 5.1.1 材料與方法 61 5.1.2 環形加工路徑 63 5.1.3 掃描加工路徑 65 5.2 加工結果與討論 67 5.2.1 軸對稱微結構 68 5.2.2 自由曲面微結構 75 5.2.3 深度誤差與表面粗糙度 80 5.3 本章小結 82 6. 逆向加工研究 83 6.1 基本概念 83 6.1.1 演算流程 83 6.1.2 模組參數 85 6.2 逆向模組模擬結果 88 6.2.1 標準倒梯形結構範例 88 6.2.2 自由曲面結構範例 91 6.2.3 誤差分析 94 6.2.4 修正模組與結果 97 6.2.5 運動規劃 98 6.3 實際加工範例 99 6.3.1 方底圓透鏡結構加工 99 6.3.2 加工結果與討論 102 6.3.3 三維複合漸進式微結構加工 102 6.3.4 加工結果與討論 104 6.4 本章小結 107 7. 結論 108 參考文獻 110

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