隨著人們對於吸收資訊的渴望與對視覺享受的要求，使得顯示科技不斷進步，各類光電產品亦迅速發展。為了朝向輕薄化的趨勢發展，並且兼顧良好的成像品質，許多複雜的微結構被設計、應用在透明材料，如ITO(indium tin oxide)導電玻璃和塑膠等。這類透明元件尺寸較小，一般量測方法不適用。在先前的研究中，已經驗證了差分干涉對比顯微術(Differential Interference Contrast Microscopy, 以下簡稱DIC顯微術)用於量測透明材質待測物的可行性。然而，要將此技術應用在生產線上，必須探討各種待測物的量測極限及量測效果。
本研究探討浸潤式系統對於提高不同形貌的透明待測物量測範圍可行性，我們設定的待測物為楔形待測物、梯形待測物及弧形待測物。首先，以軟體分析系統量測條件及準確範圍，分析重建結果及誤差原因並提出修正方法，接著以實驗證實模擬之結果。結果顯示，以浸潤式DIC顯微系統量測透明材質的楔形及弧形壓印試片時，能夠有效的提高量測範圍，也驗證了模擬與實驗的匹配性。而未來可用來量測不同待測物，探討浸潤式差分干涉系統用於改善其他形貌之量測範圍可行性。

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