本論文以製程的觀點，評估台灣半導體業原廢水中的可能有機物種、年度排放量及估計之排放濃度。同時將這些估計值與環保署所提供的廠商申請資料做比對，以驗證評估之可靠性。此外針對這些有機物種，評估以光氧化技術的可行性。結果指出半導體業廢水中之PGMEA、TMAH、IPA、NMP、EL及Phenol之估計濃度分別為0.272、176、9.36、4.11、0.124及0.086 mg/L，就20工廠其每年由廢水所排放的有機物質約有4560公噸，而原廢水的COD估計約為182.5 mg/L。由TOC與GC-MS所得的結果，可知光氧化反應器的方法，其對水中PGMEA、IPA、EL及Phenol等有機物之礦化具有不錯效果。

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