本論文旨在彌補微掃描鏡因製程誤差所生成的共振頻不確定性，使元件能維持在其共振頻並能有最大輸出，並進一步提升微掃描鏡的掃描品質。本研究中所使用的微掃描鏡依其致動方式，分作電磁式以及靜電式兩種，在設計回授控制系統前，必須先了解受控系統的動態行為及輸出特性，並據此建立動態模型，用以設計與模擬控制器，而所建立的數學模型會進一步經由系統鑑別來驗證。由於本研究中所使用的靜電式微掃描鏡為參數共振的系統，使其頻率響有遲滯現象的發生，故改採人工量測的方式進行系統鑑別。
本研究以鎖相迴路作為彌補快軸共振頻飄移及誤差的控制策略，並在迴路中加入非線性控制增益以及緩衝相位，避免系統崩毀以及元件的毀損。在慢軸方面則是並根據元件掃描軌跡的特性，調整其驅動訊號的頻率，並設計控制器及驅動方式用以改善其投影品質。所採用的控制策略與模擬結果吻合，並在實際控制元件上取得初步的成果。

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