中文摘要
一般SOI晶片其元件層之單晶矽具有優良之材料性質，適於製作微元件，且其製程普遍簡單，但元件製作缺乏變化性，而面型微加工技術雖可製作各式各樣設計，但元件性能易受薄膜性質影響，因此本文利用溝槽回填之技術完成面型元件整合SOI晶片製程，不但兼具兩者優點且有互補之功效，可提升微元件性能。

據此整合製程提出一微光學平台架構，包含下列元件︰梳狀致動器、微平台、微光學元件、微絞鏈及微卡榫等定位機制。主要利用一移動平台乘載被動光學元件概念，使致動器和微光學元件效能可分別掌控，獲得提升。

微光學平台具有三項特色，首先利用致動器提供主動光調變機制，增加微光學平台應用範圍；其次是利用單晶矽製作厚結構為致動器之用，不但提升致動器之效能，並透過適當設計增加可靠度及穩定性；第三則是藉由面型微加工技術可製作各式各樣微光學元件、微絞鏈及微卡榫，整合於微平台上。由於微光學平台架構具有以上優勢，因此在各式光學微機電系統應用中極具潛力。

Abstract
The reliable material property of device layer on SOI wafer is suitable for fabricating micro devices, but the current proposed processes of SOI wafer are too simple to manufacture devices with various functionalities. On the contrary, the surface micromachining is good at achieving complicated design; but the residual stress of thin film destroys devices. Combining the individual advantages of SOI wafer and surface micromachining, an integration process is established by trench-refilled technology in the thesis.

The microoptical bench with the proposed integration process is comprised of micro optical device, some hinges and latches on a comb-drive micro bench. By decoupling the functionalities of actuator and passive optical device, the performance of the two components will be significantly improved.

The proposed microoptical bench provides active light modulation with actuator, which is capable of increasing the applications of microoptical bench. Besides, the fabricated high-aspect-ratio actuators with single crystal silicon have excellent performance in reliability and stability. Furthermore, the surface micromachining is able to fabricate various optical devices, hinges and latches for integrating with micro bench. Therefore, the proposed microoptical bench is potential in optical applications.

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