本實驗針對人工超晶格薄膜之微波調諧特性做研究，冀望能藉由此結構達到非揮發之特性，進而應用於鐵電微波調諧元件中。鐵電調諧元件之電容會隨著外加電壓而改變，謂之調變力(tunablity)，但當外加電壓消失時，電容即會恢復為原來之值，在應用上面會有些許的限制，因此在結構上我們有了新的想法，也就是利用超晶格的結構，一層疊鐵電性之鋯鈦酸鉛(PZT)，另一層則疊具有調變性之鈦酸鍶鋇(BST)，利用PZT在電場除去時所保留之殘存極化量(Pr)，當作材料的內建電場，如此一來當施加在此超晶格結構上之電場移除時，整體的電容值並不會回到未加電場時之值，即是非揮發性微波調諧特性。
鈦酸鍶鋇((Ba,Sr)TiO3)材料具有高的調變力以及不差的介電損失，目前被認為是最適合發展微波元件的材料之一，因此在本實驗中使用BST作為提供調變力之材料，而選用PZT則是考量到鐵電材料的一些基本性質，如保存性(retention)和耐久性(endurance)以及寫入電壓，但在實驗中發現，PZT的保存性不如預期，以致於在外加電場移除後，電容隨著時間回復的很迅速。

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