一個基本的太陽能電池需要一個PN接面，前後加上電極最後還要一層抗反射層，到了如今，各個團隊設計出了各種結構太陽電池，也就是為了希望能提升太陽電池效率，而其中幾種較常見的高效率太陽電池例如埋入式接點太陽電池(Buried-Contact Solar Cell,BCSC)，它的特色為增加電極收集載子的能力，又或者是例如格柵(Grating)太陽電池，其主要概念是利用蝕刻技術將電池表面做格柵狀之結構，以增加入射光的利用。
在過往有研究團隊研發出一種名為OECO(obliquely evaporated contacts)太陽能電池，其目的是利用斜向電極的特性，改善光的遮蔽率，以達到效率的提升。在結構的製作過程中，他們利用多重的刀片，在晶圓上刻劃出數條的垂直溝槽，在電極的部分，則是利用專屬設計的蒸鍍腔體讓金屬能以斜向的方式蒸鍍在垂直溝槽的斜邊上，如此完成一個元件。而在本實驗中，則是選擇乾蝕刻機台去取代刀片，在晶圓上以非等向性的方式蝕刻出垂直結構，並想辦法將元件侵斜一個角度以利於斜向的蒸鍍，藉由上述的步驟，希望能達到提升效率的目的。
本文中也會利用加熱過後的KOH去對矽基板作蝕刻的動作，將表面製作出斜面的結構並對其作斜向蒸鍍的金屬製程，完成所有程序後將其與垂直結構的元件作效率上的一個比較，最後對有缺失的地方提出改進的方法並做分析與討論。

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