本研究以田口法設計 AlCrSiTi 合金成分，利用真空電弧熔煉製備非等莫耳 AlCrSiTi 多元合金靶材，並以反應式射頻磁控濺鍍法鍍製多元氮化物薄膜，藉由硬度、綜合性質(H^3/(x^2×E^2 ))、氧化層厚度的因子反應分析，求得硬度最佳化成分 H，其硬度為 32 GPa；綜合性質最佳化成分W，其綜合性質為 24.2；抗氧化性最佳化成分 X，其 1000 ºC，2 h的氧化層厚度僅 92 nm。三種成分再進行最佳化鍍膜參數調整，其中H與 W最佳製程鍍膜的性質為硬度 33 GPa與綜合性質為 24.2；而X 薄膜製程最佳化的氧化層厚度僅有 81 nm。在附著性試驗當中可以發現加入自身合金中間層之後，薄膜的附著性有所提升，其中又以最佳綜合性質成分的附著性表現最佳；最佳硬度成分在磨耗試驗中有最低的磨耗速率，歸因於其出色的硬度表現；銑削試驗中以最佳綜合性質的刀腹磨耗表現最佳，在低轉速的銑削條件下，最佳綜合性質的撞擊區深度僅有 175 µm，最大刀腹磨耗僅 100 µm；在高轉速的銑削條件下，其撞擊區深度為 216 µm，最大刀腹磨耗僅有 71 µm，其優異的表現歸因於最佳綜合性質薄膜與工件間良好的附著性，此薄膜的表現大幅優於商用薄膜 TiN 及 TiAlN，並與 TiAlCrN 之結果相媲美。顯示本實驗之 (AlCrSiTi)100XNX 具有刀具鍍膜應用潛力。

The AlCrSiTi alloy composition was firstly designed by Taguchi method, and the non-isomolar AlCrSiTi multi-element alloy targets were prepared by vacuum arc melting, and the multi-element nitride films were deposited by reactive radio frequency magnetron sputtering. The hardness, integrate property (H^3/(x^2×E^2 )) and oxidation resistance of AlCrSiTi nitride films with different composition were investigated and then analyzed by factor effects. We got the best hardness optimized film H with a hardness of 32 GPa, the best integrate property optimized film W with a value of 24.2, and the best oxidation resistance optimized film X with an oxide thickness of only 92 nm at the oxidation condition of 1000 C, 2 h. The optimized coating parameters were adjusted for these three films. The properties of the H and W coating were still the hardness of 33 GPa and the integrate property of 24.2. The thickness of the oxide film optimized for the X film process was only 81 nm. In the adhesion test, it can be found that the adhesion of the film is greatly improved after the addition of the self-alloy intermediate layer, and the adhesion of the best integrate property film is the best. The best hardness film has the lowest wear rate in the wear test. This is attributed to its excellent hardness performance. In the cutting test, the film with the best integrate property presents the lowest flank wear because of the good adhesion between thin film and cutting tool. In the condition of low revolutions per minute, the flank wear of the film with the best integrate properties was only 100 µm, which was much better than the flank wear of the cutting tools deposited with TiN and TiAlN and is comparable to that of TiAlCrN. This research demonstrates that the (AlCrSiTi)100XNX nitride films have a potential for the application of the protective hard coating on the cutting tools.

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