中文摘要

二氧化鈦延伸式閘極離子感測場效電晶體之研究

本論文是以Dual E-Gun Evaporation System沈積Titanium Oxide (TiO2)薄膜，作為延伸式閘極離子感測場效電晶體(EGFET)的感測膜，以此進行溶液中H+離子濃度的量測。文中將討論：(1) TiO2感測膜對H+離子之擷取與元件相關電性。(2) TiO2感測膜的特性分析。

從實驗中得知TiO2薄膜EGFET的感測度50∼74 mV/PH(T=29℃)，pH值範圍為3∼9，可以證明TiO2 薄膜是很好的H+離子的感測膜。

本論文中發現TiO2 薄膜的成分組成，當CO/CTi的比例越高的話，其感應靈敏度也會跟著上升，所以要改善TiO2 薄膜的感應靈敏度，可利用熱處理等方式提高TiO2 薄膜的含氧比例。

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