CIGSSe薄膜太陽能電池光學特性檢測與EQE 分析｜國立清華大學博碩士論文庫

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研究生：	徐子珺 Hsu, Tzu-Chun
論文名稱：	CIGSSe薄膜太陽能電池光學特性檢測與EQE 分析 Optical Characteristics and EQE Analysis of CIGSSe Thin Film Solar Cells
指導教授：	甘炯耀 Gan, Jon-Yiew
口試委員:	賴志煌徐偉倫
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2019
畢業學年度：	107
語文別：	中文
論文頁數：	116
中文關鍵詞：	銅銦鎵硒、銅銦鎵硒硫、太陽能電池、橢圓儀、歐傑電子能譜儀、縱深分析、外部量子效率
外文關鍵詞：	CIGS, CIGSSe, Ellipsometer, AES, DepthProfile, SolarCell, EQE
相關次數：	點閱：4 下載：0
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銅銦鎵硒硫(CIGSSe)薄膜太陽能電池是近年來非常受到看好的太陽能電池，擁有可沉積在撓曲基板上、較少的材料使用量與優秀的效率表現等優點。這類的薄膜太陽能電池中，如何提升Jsc(短路電流)是一項重要的議題，外部量子效率 (EQE)是量測Jsc的重要方法，影響EQE表現的因素包括太陽能電池的光電流產生與載子收集，本實驗欲針對光電流產生的部分進行探討，並嘗試進行CIGSSe太陽能電池EQE表現的擬合。
光電流產生與材料的光學係數有密不可分的關係，現今還未有針對CIGSSe吸收層薄膜的成分的吸收係數研究，本實驗從歐傑電子能譜儀(AES)縱深分析著手，求得能隙與GGI[Ga/(Ga+In)]對縱深分佈的關係，結合文獻中CIGS介電常數的研究，求得CIGSSe薄膜各成分的介電常數，進一步計算出其光學常數與吸收係數，分析薄膜成分分佈與光電流產生情形。
除了吸收層以外，本實驗利用橢圓儀來量測窗口層與緩衝層的光學性質，橢圓儀具有非破壞性、高精確度、量測快速等優點，利用橢圓儀量測到的光偏振性變化，建構出樣品的光學模型與介電方程式，以此求出窗口層與緩衝層的光學常數。藉由上述的各層薄膜光學特性與前太陽能電池表面、背電極的光反射量測，擬合出太陽能電池EQE的表現。藉由擬合的方式得到太陽能電池的EQE，並分析其中各膜層光損耗與光吸收數值。

Copper indium gallium selenide (CIGSSe) thin film solar cells are very promising solar cells in recent years. They have the advantage of being able to deposit on flexible substrates, less material usage and excellent efficiency. In such thin film solar cells, how to improve JSC (short circuit current) is an important issue. External quantum efficiency (EQE) is an important method for measuring Jsc. Factors affecting EQE performance include generation rate and collection probability. This research is to explore the part of the generation rate and try to simulate the EQE performance of the CIGSSe solar cell.
The light generated current is directly related to the optical coefficient of the material. There is no research about the absorption coefficient of the CIGSSe absorber layer. This research starts with the depth profile analysis of the Auger electron spectroscopy (AES) to find the energy gap distribution of CIGSSe. The relationship between GGI[Ga/(Ga+In)] and the depth profile, combined with the study of the CIGS dielectric constant in the literature, was used to determine the dielectric constant of each component of the CIGSSe. The optical constant and absorption coefficient were further calculated, and the composition distribution of the film and the light generated current were analyzed.
In addition to the absorber layer, this research uses an ellipsometer to measure the optical properties of the window layer and the buffer layer. The ellipsometer has the advantages of non-destructive, high precision, fast measurement. The optical model and dielectric equation of the sample were constructed by measuring the change of polarization by the ellipsometer. The optical constants of the window layer and the buffer layer are obtained. The solar cell EQE was simulated by the optical properties of the respective layers mentioned above and the light reflection by front solar cell surface and the back electrode were measured by UV-vis. The EQE of the solar cell was obtained, and the optical loss and gain of each mechanism were analyzed.

致謝    I
摘要    II
Abstract    III
目錄    V
圖目錄    VIII
表目錄    XI
Chapter1 緒論    1
Chapter2 文獻回顧    5
1 太陽能電池的基本原理    5
2 CIGSSe太陽能電池的結構    6
2.1 基板    6
2.2 背電極    7
2.3 吸收層    7
2.4 緩衝層    8
2.5 窗口層    8
3 太陽能電池的性能參數    9
3.1 太陽能電池的短路電流[19, 20]    10
3.2 太陽能電池的開路電壓    10
3.3 太陽能電池的填充因子    11
3.4 太陽能電池的量子效率[20]    12
4 縱深分析    12
4.1 縱深分析比較    13
4.2 歐傑電子能譜儀    14
5 CIGS與CIGSSe的能隙縱深分析    18
Chapter3 橢圓儀簡介與分析方法    23
1 光學傳播與光學原理[37]    23
1.1 光的傳播    23
1.2 電磁波    24
1.3 光的反射與透射[37]    25
1.4 介電極化與介電常數    27
2 光的偏振性    30
2.1 P與S偏振光    30
2.2 光波的偏振狀態    32
2.3 瓊斯矩陣    34
2.4 史托克士參數    37
2.5 龐加萊球    39
2.6 部分偏振光    40
2.7 穆勒矩陣    40
3 橢圓儀的原理    41
4 橢圓儀量測[37]    42
5 光譜橢圓偏振數據分析[40]    43
5.1 MSE（Mean Squared Error）    44
5.2 評估擬合數據[40]    45
5.3 吸收性薄膜的橢圓儀量測與分析[41]    46
6 介電方程式模型 [37, 42]    47
6.1 Lorentz Model    47
6.2 Cauchy Model    50
6.3 Tauc-Lorentz Model    51
6.4 Drude Model    52
6.5 Gauss Model    52
6.6 Critical Point Model    52
7 CIGS的吸收係數    52
Chapter4 實驗方法與流程    60
1 實驗流程    60
2 實驗儀器    61
2.1 歐傑電子能譜儀    61
2.2 橢圓儀    62
3 CIGSSe吸收係數的求得方法    62
4 窗口層與緩衝層光電性質的量測    64
5 Matlab的計算    65
Chapter5 結果與討論    68
1 AES縱深分析    68
1.1 Spectrum overlap    68
1.2 縱深分析的比較    72
1.3 CIGSSe solar cell AES縱深分析    75
2 CIGSSe吸收係數的計算    78
3 窗口層AZO的光學性質    82
3.1 AZO的AES縱深分析    82
3.2 窗口層AZO的橢圓儀光學性質分析    83
4 緩衝層Zn(O,S)的光學性質    85
4.1 緩衝層Zn(O,S)的AES縱深分析    86
4.2 緩衝層Zn(O,S)的橢圓儀光學性質分析    86
5 EQE擬合    95
5.1 擬合EQE的光損耗與光吸收    100
6 吸收層成分分布與吸收率之關係    102
Chapter6 結論    104
Chapter7 參考文獻    106
Appendix    110

                                

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