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研究生: 鄭忠
Chung Cheng
論文名稱: 有機共軛高分子發光二極體與SU-8波導整合暨高效率藍光二極體之研究
Studies on Integration of PLED and SU-8 waveguide for signal transmission on silicon substrate and blue PLED
指導教授: 洪勝富
Sheng-Fu Horng
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 39
中文關鍵詞: 波導SU-8有機發光二極體
外文關鍵詞: waveguide, SU-8, polymer light emitting diode(PLED)
相關次數: 點閱:3下載:0
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  • 有機發光二極體一直是被認為下一個世代的顯示革命,本論文的目的是將有機發光二極體與SU-8波導整合於矽基板上,利用現有成熟的矽製程技術,將來和CMOS整合,可以達到資料傳輸的目的。
      本論文已經成功的將紅光及綠光發光二極體和SU-8波導整合於矽基板上,並直接在發光二極體上利用電光轉換來調制訊號,並在波導末端利用光偵測器來偵測調制後的訊號,為了達到多波長光和SU-8波導整合的目的,我們針對藍光材料做了許多研究,希望先藉由光激發光來選擇適合的藍光材料,再製作成電激發光元件,目前商業化藍光材料是以PFO-DMP表現的效率最好。
      SU-8是微機電領域常用的厚膜光阻,因其折射率為1.5,且對化學及熱有良好的穩定性,所以我們使用SU-8為波導材料,如何將發光二極體的光耦合進入波導之中,也是本論文的研究重點,我們嘗試過45度斜面、光柵電極及光散射層的方法,最後採用光散射層的方法,因為其製程容易及成本低的優點。
      要達到通訊的目標,調制的頻率至少要達到1M Hz,本實驗結果証實了,利用黃綠光材料,在200K Hz時,仍有良好的調制圖形,相信再透過製程及材料的最佳化,更能貼近我們利用有機發光二極體和SU-8波導整合於矽基板上,進行資料傳輸的目的。


    Polymer light emitting diodes (PLED) have been always
    considered as promising candidate for next generation of display
    technology. The purpose of this thesis is to investigate the integration of
    PLED and SU-8 waveguide on silicon substrate for data communication.
    The Integration of red and green PLED with SU-8 waveguide on silicon substrate and the use of photodetector to measure electro-optic modulation from waveguide is successfully demonstrated. In order to achieve multi-wavelength transmission in SU-8 waveguide, we also focused on blue PLED. PFO-DMP is the best commercial blue material because it is of high photoluminescence and electroluminescence
    efficiency.
    SU-8 exhibits good thermal and chemical stability and it’s refractive coefficient is 1.5. It is suitable for waveguide material. We found that diffusion layer is the most cost-effective and feasible
    processing method to couple light into waveguide.
    The minimum requirement of modulation frequency of data communication is 1M Hz. In our devices, good modulation at 200k Hz
    was achieved. We believed with continued studies, the data communication with PLED on SU-8 waveguide will become possible.

    目錄 第一章 緒論---------------------------------------------01 1.1前言--------------------------------------------------01  1.1.1積體光學發展背景----------------------------------01  1.1.2有機高分子發光二極體發展背景----------------------02 1.2研究動機及目標----------------------------------------03 1.3論文架構----------------------------------------------04 第二章 實驗理論-----------------------------------------05 2.1共軛有機高分子----------------------------------------05 2.2有機發光二極體結構------------------------------------05 2.3發光原理----------------------------------------------06 2.4光波導理論--------------------------------------------09 第三章 實驗方法-----------------------------------------12 3.1元件結構----------------------------------------------12  3.1.1光波導元件結構------------------------------------12  3.1.2有機高分子發光二極體元件結構----------------------14 3.2元件製作----------------------------------------------14  3.2.1波導元件製作--------------------------------------14  3.2.2發光二極體元件製作--------------------------------18 3.3 PL量測-----------------------------------------------19 第四章 結果分析與討論-----------------------------------21 4.1 SU-8 2010和SU-8 2050測試----------------------------21 4.2金陽極蒸鍍及平整度問題--------------------------------21 4.3發光結果----------------------------------------------23 4.4調制量測----------------------------------------------26 4.5藍光有機高分子二極體----------------------------------29 第五章 總結---------------------------------------------37 參考文獻-------------------------------------------------38

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