本研究的目的在於探討利用物理氣相沉積方法鍍著氮化鋯薄膜於鎳基超合金Haynes 282上經真空熱處理後的防蝕性質增強討論。首先利用非平衡磁控濺鍍系統將氮化鋯薄膜鍍著於Haynes 282與矽基材上，之後將試片在高真空(4×10-6 Torr)及攝氏950度的環境下，進行2到4小時的真空熱熱處理。熱處理後的試片在掃描式電子顯微鏡的觀察下可發現薄膜表面的粗糙度上升。由X光繞射結果顯示，即使經過4小時的真空熱處理，在兩種基材上之薄膜仍以氮化鋯為主要相。氧原子分布經歐傑電子能譜分析在薄膜外側表面以及薄膜與金屬之介面都可以被觀察到，推測分別形成內外氧化層。
在0.5M之硫酸電解液中，動態極化掃描的結果顯示未鍍膜之Haynes 282展現了均勻腐蝕且未形成穩定之鈍化層，而經氮化鋯覆膜之Haynes 282展現極佳的抗蝕性，試片腐蝕電流密度下降為原先之萬分之一。在重量百分比3.5%之鹽水電解液中，經動態極化掃描的結果顯示Haynes 282本身比起304不鏽鋼擁有更好的抗蝕性，而在氮化鋯薄膜披覆後，腐蝕電流密度可下降至原先的十分之一，且經真空熱處理後，覆膜試片在兩種電解液中之腐蝕電流密度皆可進一步下降。經過500小時的鹽霧測試後，所有鍍膜以及未鍍膜之Haynes 282試片之腐蝕面積均在1%以下，僅對照用的其餘金屬有顯著﹙大於1%﹚的腐蝕面積。利用AXS方法分析之殘餘應力，鍍著於Haynes 282上氮化鋯之壓應力在真空熱處理後增加。
本研究結果顯示利用非平衡磁控濺鍍系統鍍著之氮化鋯薄膜，鍍膜後以及經真空熱處理後均未脫落，可以提升Haynes 282在硫酸以及鹽水中之抗腐蝕性，並且可藉由真空熱處理可以進一步提升。

The purpose of this study was to enhance the corrosion resistance of the vacuum annealed ZrN thin film on the nickel-based superalloy by the physical vapor deposition. First, an unbalanced magnetron sputtering system was used to deposit the ZrN film on Haynes 282 and the silicon substrate, and then the specimen was annealed in vacuum (4×10-6 Torr) at 950˚C for 4 hours. After the heat treatment, the surface roughness of the vacuum annealed ZrN was increased observed by scanning electron microscope. The diffraction pattern of X-ray shows that after vacuum heat treatment for 4 hours, the ZrN phase is still dominant. The distribution of oxygen atoms can be observed on the surface of the thin film and interface between the thin film and the substrate by Auger electron spectroscopy analysis, which implies the existence of inner and outer oxide layers.
The results of the potentiodynamic polarization scan showed that the uncoated Haynes 282 exhibited uniform corrosion without forming a stable passivation layer, while the Haynes 282 coated with zirconium nitride showed excellent corrosion resistance in a 0.5M sulfuric acid electrolyte. The corrosion current density of the specimen decreases 4 orders of magnitude. In a 3.5 wt% saltwater electrolyte, the results of dynamic polarization scanning show that Haynes 282 has good corrosion resistance, and the corrosion current density decrease after ZrN deposition. After vacuum heat treatment, the corrosion current density of the coated specimens in the two electrolytes can be further decreased. After 500 hours of salt spray test, the corrosion area of both coated and uncoated specimens was below 1%. By using the average X-ray strain method, the vacuum annealed ZrN displays the compressive stress, which is presumably contributed by the thermal stress due to the difference in the coefficient of thermal expansion between the film and the metallic substrate.
The results of this research show that the ZrN thin film deposited by the unbalanced magnetron sputtering system does not fall off after vacuum heat treatment, which can improve the corrosion resistance of Haynes 282 in sulfuric acid and saltwater.

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