本研究宗旨在於發展利用自組裝單分子膜來增進SU-82035負型光阻與玻璃基材之間的黏著力，以期能達成能抵抗物理性或化學性的破壞，擴大SU-8 2035在微機電系統中應用的空間，提升微機電系統元件製程良率的目標。高分子材料與基材表面的黏著力向來是應用上的一大問題，因此如何有效的改善，並穩定的控制表面特性來達到控制黏著力的目的，便成了很重要的課題。自組裝單分子的特色是，製程簡單、製程後表面特性穩定、時效長、不易被破壞等優點，近年來已被廣泛的研究。
本研究提出，成功的利用自組裝單分子膜來增進SU-8 2035與玻璃基材之間的黏著力，並且比較利用表面粗糙度、電漿處理、化學蝕刻等方式來提升SU-8 2035與玻璃基材間的黏著力，發現自組裝單分子膜所得到的黏著力提升的效果要大於其他方式所得，並且再透過對自組裝單分子膜進行退火處理，使其重新排列整理後，效果更益明顯，提高黏著力達4倍有餘，由此可知自組裝單分子膜的優劣影響黏著力甚巨，因此要更提升黏著力，則必須再對自組裝單分子做更詳細的研究，此外如何提高SU-8 2035與基材之間鍵結反應的效率，亦是相當重要的關鍵之一。本研究量測基於表面微刮痕測試（micro-scratch tests），能於定性上提供黏著力優劣的比較，再結合原子力顯微鏡和表面動態分析儀，對自組裝單分子膜進行特性研究，並實際運用自組裝單分子膜於SU-8製作微小結構之測試與觀察。

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