奈米碳材具有多項特殊且優異的性質，因而工業應用潛力無窮，目前已知製備奈米碳材的方法中，尚缺乏控制奈米碳材長度的有效對策；本研究將針對電弧放電法進行探討，再規劃出能自動製備單層碳管、多層碳管、奈米碳粒並控制碳管生成長度的實驗裝置；研究工作內容主要分為：脈衝產生器和馬達控制電路的製作及其衍生設計之實驗設備，期能以控制電流大小、切換頻率與脈波寬度為參數製備奈米碳管及碳粒。至於實驗驗證部份，係將實驗產物藉由穿透式電子顯微鏡進行觀察鑑定其種類及成份，經由實驗結果初步發現，碳管之長度隨脈衝電流時間增加而增長，本設備所能控制生長的碳管長度約在50到700 奈米之間，如將電漿設備切換頻率設定為250Hz導通週期為0.25時，發現可得到以碳粒為主的奈米生成物，且設備之操作及參數設定均可藉由規劃之功能，進行精確量測與控制，朝向未來商品化之方向邁進。

Nano carbon materials exhibit many unique properties and hence have enormous potential for industrial applications. Currently, all known fabrication methods were not able to accurately control the particle length. In this investigation, the Arc-Discharge Method have been developed with basic experimental setup being capable of not only fabricating the single-wall carbon tubes, multi-wall carbon tubes, and carbon onions automatically but also controlling the tube length. Moreover, a pulse generator and the associated control circuits for the servo motor have been employed for controlling the electric current, switching frequency, and current pulse-width during the fabrication process. As a further step, the Transmission Electron Microscope (TEM) was used for measuring the contents and compositions of the fabricated specimens. According to the experimental results, the carbon -tube length increases with time when the pulse current is set for constant. The controllable tube-length during fabrication process ranges from 50 to 700 nm. Stable nano particles have been obtained when the switching frequency of the plasma equipment is set at 250 Hz with duty cycle being at 0.25. The apparatus has performed precise electric current and electrode position control based upon the control parameter settings and would be useful for commercial uses in the future.

[1]http：//www.research.ibm.com/nanoscience/fet.html, April 2004.

[2]S. Iijima, ”Helical Microtubules of Graphitic Carbon,” Nature 354, pp. 56-58 , 1991.

[3]C. Journet and P. Bernier, “Production of Carbon Nanotubes,” J. Appl. Phys, Vol. 67, No. 1, pp.1-9, 1998.

[4]T. W. Ebbesen and P.M. Ajayan, “Large-scale Synthesis of Carbon Nanotubes ,” Nature 358, pp. 220-222, 1992 .

[5]D. T. Colbert, J. Zhang, S. M. Mcclure, P. Nikolaev, Z. Chen, J.H. Hafner, D.W. Owens, P. G. Kotula, C. B. Carter, J. H. Weaver, A. G. Rinzler and R. E.Smalley, “Growth and Sintering of Fullerene Nanotubes,” Science, Vol. 266, pp.1218-1222, 1994.

[6]T. W. Ebbesen, H. Hiura, J. Fujita, Y. Ochiai, S. Matsui and K. Tanigaki, “Patterns in the Bulk Growth of Carbon Nanotubes,” Chem. Phys .Lett., Vol. 209, No. l, pp.83-86, 1993.
[7]T. Guo, P. Nikolaev, A. Thess, D. T. Colbert and R. E. Smalley, “Catalytic Growth of Single-walled Nanotubes by Laser Vaporization,” Chem. Phys. Lett., Vol. 243 , No.1, pp. 49-54, 1995.

[8]M. J. Yacaman, M. M. Yoshida, L. Rendon and J. G. Saniesteban, “Catalytic Growth of Carbon Microtubules with Fullerene Structure,” Appl. Phys. Lett, Vol. 62, No. 2, pp. 202-204, 1993.

[9]L. C. Qin, D. Zhou, A. R. Krauss and D. M. Gruen, “Growing Carbon Nanotubes by Microwave Plasma-enhanced Chemical Vapor Deposition,” Appl. Phys. Lett, Vol. 72, No. 26, pp. 3437 –3439, 1998.

[10]T. W. G. Wildoer, J. L. Huang, P. Kim and C. M. Lieber, “Structure and Electronic Properties of Carbon Nanotubes,” Phys.Chem. B, Vol. 104, pp. 2794-2809, 2000.

[11]辛玉麟，黃國柱，”翻轉世界的物質－奈米碳管,”科學月刊，第三十三卷第十期, pp.850, 2002.

[12]M. Terrones, W. K. Hsu, H. W. Kroto, M. Walton, “Nanotubes: A Revolution in Materials Science and Electronics,” Topics in Current Chemistry, Vol. 199, pp. 189-234 ,1998.

[13]M. S. Dresselhaus, G. Dresselhaus and R. Saito, “Physics of Carbon Nanatubes,” Carbon, Vol. 33, No.7 , pp. 883-891 ,1995.

[14]J. Hone, M. Whitney and A. Zettle, “Thermal Conductivity of Single-walled Carbon Nanotubes,” Synthetic Metals, Vol. 103, pp. 2498-2499, 1999.

[15]S. Berber, Y. K. Kwon and D. Tomànek, “Unusually High Thermal Conductivity of Carbon Nanotubes,” Phys. Rev. Lett, Vol. 84, pp.4613-4616, 2000.

[16]M. M. J. Treacy, T. W. Ebbesen and J. M. Gibson, “Exceptionally High Young's Modulus Observed for Individual Carbon Nanotubes,” Nature 381, pp.678-670, 1996﹒

[17]M. F. Yu, O. Lourie, M. J. Dyer, K. Moloni, T. F. Kelly and R. S. Rouff, “Strength and Breaking Mechanism of Multiwalled Carbon Nanotubes Under Tensile Load,” Science, Vol. 287, pp. 637-640, 2000.

[18]H. Hiura, T. W. Ebbesen, J. Fujita, K. Tanigaki and T. Takada, “Role of sp3 Defect Structures in Graphite and Carbon Nanotubes,” Nature 367, pp. 148-151, 1994.

[19]A. Thess, R. Lee, P. Nikolaev, H. Dai, P. Petit, J. Robert, C. Xu, Y. H. Lee, S. G. Kim, A. G. Rinzler, D. T. Colbert, G. Scuseria, D. Tománek, J. E. Fischer and R. E. Smalley, “Crystalline Ropes of Metallic Carbon Nanotubes,” Science, Vol. 273, pp.483-487, 1996.

[20]S. Frank, P. Poncharal, Z. L. Wang and W. A. de Heer, “Carbon Nanotube Quantum Resistors,” Science, Vol. 280, pp. 1744-1746 ,1998.

[21]http://www.pa.msu.edu/cmp/csc/ntproperties/ , April 2004.

[22]H. Dai, E. W. Wong and C. M. Lieber, ”Probing Electrical Transport in Nanomaterials: Conductivity of Individual Carbon Nanotubes,” Science, Vol. 272, pp. 523-526 , 1996.

[23] J. R. Roth, Industrial Plasma Engineering, Vol. 1: Principles, Institute of Physics Publishing Bristol and Philadelphia, pp.353 , 1995.

[24]陳淳杰， ”從實例中學習OrCAD PSpice, ”儒林圖書有限公司，pp.1-7, 1999.