摘要

本研究利用化學液相鍍膜法(Chemical solution deposition)，以醋酸為溶劑，製備BaPbO3薄膜（簡稱BPO），旋鍍在各種基板上，探討其高溫穩定性、表面微結構之差異：在SiO2/Si基板上，650oC以上BPO相消失。在Pt/Ti/SiO2/Si基板上，750oC以上BPO相消失。在Pt/TiN/Ti/SiO2/Si基板上，會有BaCO3雜相，750oC以上BPO相消失。在Pt/Ta/Si3N4/Si上，在高溫時BPO會與Ta反應成Ba2Ta2O7。除此之外，藉著鉛過量及添加其它元素，改善BPO薄膜之性質，發現鉛過量30%在白金鉭基板上，有助於BPO成相，對於白金鈦基板則否；添加Zn或Bi則可改善BPO薄膜微結構的緻密度及平整度。BPO薄膜的電阻率大約在2.5~3.5*10-5Ω.cm左右。

利用研究的BaPbO3薄膜作為Pb1.05(Zr0.53Ti0.47)O3的氧化物電極，與使用白金作為下電極的PZT比較兩者電性之差異。實驗結果顯示，以BPO作為PZT的氧化物電極，可降低PZT的結晶溫度，減少rosette微結構產生，提高殘存極化值和抗疲勞性。我們認為化學液相鍍膜法所製備的BPO薄膜，在鐵電材料的氧化物電極應用上，有極大的潛力。

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