本論文研究靜電式微機電元件之電容感測電路，由於微元件之電容訊號輸出極微小(fF等級)且易受雜訊所干擾，故需要一能抵抗雜訊、高準確度的電路系統來作感測。而本論文提出一具高解析度、高靈敏度的電容感測電路，包含電容電壓轉換(Capacitance-Voltage Converter)和差動式感測電路之架構，藉由HSPICE軟體的分析，對所設計之電容感測電路進行性能上的模擬，可得到高線性度的結果，證明此電容感測電路之可行。且透過國家晶片系統設計中心(CIC)，利用tsmc 0.35□m Mixed-Signal 2P4M Polycide 3.3/5V製程，製作完成後建構SOI晶圓為基材的靜電式微元件與感測電路之整合平台，針對理論和模擬進行驗證。所設計的差動式電容感測電路可量測的最小電容變化量達到2 fF，靈敏度則為每1 fF的改變量可得到約4.3 mV的電壓輸出。由於電容感測電路具有與CMOS積體電路之製程匹配、量測穩定度高等優點，將能應用於微加速度計、微陀螺儀等微慣性元件上，確保微慣性感測元件所需之性能，未來可應用於汽車之安全氣囊或導航系統中訊號的感測。

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