本次實驗利用二次離子質譜術(SIMS)進行鋁合金樣品表面分析，藉以了解曝有大量水氣的旅合金表面受同步輻射光照射後的表面變化情形。在實驗系統方面，縮小曝水腔與分析腔之間的氣導，利用差分抽氣(differential pumping)的方法，縮短曝水至出光的時間，本次實驗已將時間從原先的13小時縮短至200分鐘以內。本實驗也更改了光束引出管前端的電極，在+800 V的偏壓下，可收集散亂的光電子達90%，以釐清光電子在真空腔壁可能造成的電子引發釋氣的干擾。從SIMS表面分析的結果顯示，照光後的表面水氣與氧化物含量都有增加的現象。

1. H.F. Dylla, “Water: It’s Measurement and Control in Vacuum,” Gaithersburg, MD, May 23-25 (1994).
2. 陳俊榮，王敏惠，曾湖興，劉遠中，”不鏽鋼超高真空系統容器輝光放電清洗之研究,” 真空科技1 (1), 13 (1987).
3. K. Akaishi, K. Ezaki, Y. Kubota, and O. Motojima, “ Reduction of Water Outgassing and UHV Production in an Unbacked Vacuum Chamber by Neon Gas Discharge,” Vacuum 53, 285 (1999).
4. K. Tatenuma, T. Momose, and H. Ishimaru, “ Quick Acquisition of Clean Ultrahigh Vacuum System by Chemical Process Technology,” J. Vac. Sci. & Technol. A 11(4), 1719 (1993).
5. S.S. Inayoshi, S. Tsukahara, and A. Kinbara, “ Decrease of Water Vapor Desorption by Si Film Coating on Stainless Steel,” Vacuum 53, 281 (1999).
6. G. Raiteri, and A. Calcatelli, “ Thermal Desorption from Stainless Steel Samples Coated with TiN and Oxide Layers,” Vacuum 62, 7 (2001).
7. Y.C. Liu, J.R. Chen, J.R. Huang, and C.Y. Wu, “ 以不同溼度之氣體研究鋁合金表面熱釋氣,” 真空科技 5(3), 8 (1992).
8. J.R. Chen, K. Narushima, and H. Ishivaru, “ Thermal Outgassing from Aluminum Alloy Vacuum Chamber,” J. Vac. Sci. Technol. A 3, 2188 (1985).
9. 張志明, “ 鋁合金真空材料光子引發釋氣研究,” 碩士論文, 國立清華大學原子科學系, (1996).
10. 詹哲鎧, “ 鋁合金真空材料光子引發釋氣系統改進與研究,” 碩士論文, 國立清華大學原子科學系, (1998).
11. 楊凱淵, “ 利用PSD方法研究鋁合金表面水釋氣行為,” 碩士論文, 國立清華大學原子科學系, (2000).
12. 楊佳螢, “ 水氣在光子引發釋氣實驗系統中的行為探討,” 碩士論文, 國立清華大學原子科學系, (2001).
13. 楊財烈, “ 鋁合金表面曝水後受光照射作用之探討,” 碩士論文, 國立清華大學原子科學系, (2003).
14. R.J. Elsey, “ Outgassing of Vacuum Materials,” Vacuum 25, 299 (1975).
15. 陳俊榮, 劉遠中, “ 鋁合金超高真空材料釋氣之研究,” 科學發展月刊 15(6), (1986).
16. O. Gröbner, A.G. Mathewson, H. Stori, P. Strubin and R. Souchet, “ Studies of Photon Induced Gas Desorption using Synchrotron Radiation,” Vacuum 33, 397 (1983).
17. D. Menzel and R. Gomer, “ Desorption from Metal Surfaces by Low-Energy Electrons,” J. Chem. Phys. 41, 3311 (1964).
18. P.A. Redhead, “ Interaction of Slow Electrons with Chemisorbed Oxygen,” Canadian J. Phys. 42, 886 (1964).
19. M.L. Knotek and P.J. Feibelman, “ Ion Desorption by Core-Hole Auger Decay,” Physical Review Letters 40, 964 (1978).
20. R. Wehrle and J. Moenich, “ A Vacuum System for the Argonne 6GeV Synchrotron Light Source,” IEEE Trans. Nucl. Sci. 32, 5(1985).
21. A. Benninghoven, F.G. Rudenauer and H.W. Werner, “ Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends,” J. Wiley, New York (1987).
22. I. Popova, V. Zhukov, J.T. Yates, Jr. and J.G. Chen, “Electron Stimulated Oxidation of Al(111) in H2O Vapor: Dipole Orientation Effects in the Al2O3 Thin Film,” J. Appl. Phys. 86, 7156 (1999).
23. A. Nylund and I. Olefjord, “Surface Analysis of Oxidized Aluminum,” Surface and Interface Analysis 21, 283-289 (1994).