本論文所設計之高頻微機械式共振器主要應用於通訊上，設計目標希望超過1GHz的頻率屏障、縮小尺寸、高的quality factor Q、很小的DC損耗以及和CMOS IC製程整合。這種高頻的微機械式共振器未來希望能用來取代傳統收發器上的濾波器和震盪器。
藉著改變幾何尺寸、結構支撐處以及選擇不同振動模態的方式來做為設計高頻微機械式共振器的依據，設計了兩種共振器，分別是邊緣固定的圓盤共振器和奈米碳管機械式共振器，使用ANSYS和CoventorWare去模擬自然振動頻率及靜電-結構的耦合效應，用以判斷其自然振動頻率是否已達到設計上的要求及其受靜電力下之位移是否太小，而無法達到偵測的目的。
邊緣固定圓盤共振器的頻率大概在510MHz左右而奈米碳管機械式共振器則有超過1GHz的自然頻率，模擬和公式推導預測結果是非常接近的，製程規劃則仰賴CoventorWare，關於奈米碳管機械式共振器的能量損耗也會一併被探討。
邊緣固定圓盤共振器是一個需要六道光罩的製程，其自然頻率並不夠高且其能量的損耗也很難估計。而奈米碳管機械式共振器則是一個只需要兩道光罩的製程，其具有良好的機械特性和高頻率，而其能量損耗估計的結果在奈米尺寸時都很小，所以在通訊上的應用是一個不錯的選擇。

Design high natural frequency □mechanical resonators for communication applications. This high frequency □mechanical resonator is designed based on breaking GHz barrier, tiny size, high Q’s, zero DC power consumption and integrate with CMOS IC process. □mechanical resonators are used to replace filters, oscillators on typical transceivers.
Design high frequency □mechanical resonators by changing geometry structure, anchoring type and vibration mode. There are edge-clamped disk resonator and carbon nanotube □mechanical resonator designed. Use ANSYS and CoventorWare software to simulate the natural frequency and the electrostatic-structure coupling effect. Check the frequency is high enough or not and the electrostatic displacement is larger enough for detecting.
Edge-clamped disk resonator’s frequency is about 510MHz and carbon nanotube resonator exceeds 1GHz. The simulated results are very close to predicted values. The processes are schemed by CoventorWare tool and the energy losses of carbon nanotubes resonator are also indicated.
Edge-clamped disk resonator has six masks to manufacture. The natural frequency isn’t high enough and the losses are difficult to predict. Carbon nanotubes resonator is a 2 masks process with excellent mechanical properties and high frequency. The losses predicted are small during the nano-scale. It is a proper candidate as a high frequency □mechanical resonator for communication applications.

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