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研究生: 陳慧璇
Hui-hsuen Chen
論文名稱: 硫-鈀系統直接電鍍機構之研究
Mechanism Research of Direct Plating by Pd/S Catalyst
指導教授: 萬其超
Chi-chao Wan
王詠雲
Yung-yun Wang
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2000
畢業學年度: 88
語文別: 中文
論文頁數: 85
中文關鍵詞: 直接電鍍直接金屬化直接電鍍機構
外文關鍵詞: Direct plating, Mechanism Research of Direct Plating, Crimson process
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  • Crimson直接電鍍製程是由Shipley公司於1990年所提出之印刷電路板表面金屬化流程,用以取代無電鍍銅法。一般人常認為此一直接電鍍程序如同其它直接電鍍法,乃因 “促進化” 後使非導體上形成一硫/鈀導電膜,而此導電膜造成基材得以進行電鍍。本論文以實驗證明:Crimson直接電鍍法並非以導電度促使其得以進行。
    另一方面,以循環伏特法驗證硫-鈀直接電鍍系統乃經由硫離子架橋作用使得其銅還原反應發生於較Shadow直接電鍍系統還要正的電位。

    前人的研究認為:PdS是硫化後基板在浸入鍍液後,由其中的硫酸根促使形成的。但吾人發現不含硫酸根的焦磷酸銅鍍液,仍可進行直接電鍍速率,只是速率較慢;若是將硫化後的基板浸入含硫酸根之溶液後,再於焦磷酸銅鍍液中進行電鍍,則可加快電鍍速率。因此推斷硫化後的基板浸入含硫酸根溶液後,可能使膠體內硫-鈀的鍵結形態發生變化。

    由IR分析中發現:硫化後再浸入硫酸銅鍍液有兩種可能現象:(a) 硫-鈀鍵結形態改變。硫化後的硫-鈀的吸附態轉變為鍵結形態,此形態可能是Pd4S,但仍須更有力之證據;(b) 具直接電鍍能力的硫-鈀層對於硫酸根具吸附能力。

    將Shipley加成法專利製程中,於硫化後多加入一硫酸槽,依照本實驗的說法,Pd-S之鍵結態可在上光阻之步驟前形成,並發現此舉可加速直接電鍍速率,且對於在曝光、顯影的過程具穩定硫-鈀層作用,但仍須先克服其再現性的問題才能得到肯定的解釋。


    摘要 Ⅰ 謝誌 Ⅱ 目錄 Ⅲ 圖目錄 Ⅴ 表目錄 Ⅶ 第壹章 緒論 1 第貳章 文獻回顧 3 第一節 直接電鍍 3 第一項 鈀膠體系統 4 第二項 碳/石墨系統 6 第三項 導電高分子系統 6 第四項 光阻劑簡介 8 第五項 鍍液種類 9 第二節 直接電鍍-硫-鈀系統 10 第一項 錫鈀膠體 10 第二項 硫-鈀架橋理論 13 第三項 直接電鍍機構 18 第三節 Shadow製程 21 第四節 印刷電路板加成法介紹 25 第五節 研究動機與目的 28 第參章 實驗方法 30 第一節 硫-鈀層導電性之探討 30 活化槽濃縮液配製方法 31 第一項 硫-鈀系統 32 第二項 石墨系統 33 第三項 量測電阻 34 第四項 比較石墨系統與硫-鈀系統之直接電鍍速率 35 第五項 比較石墨系統與硫-鈀系統之銅沉積電位 36 第二節 硫酸根對硫-鈀直接電鍍系統之影響 37 第一項 活化後不含硫酸之製程是否能進行直接電鍍 38 第二項 以IR分析以硫酸銅與焦磷酸銅鍍液浸泡前後的錫鈀膠體 39 第三項 硫酸對電鍍速率的影響 41 第肆章 實驗結果與討論 44 第一節 硫-鈀層導電性之探討 44 第一項 硫-鈀系統 44 第二項 石墨系統 44 第三項 量測電阻 45 第四項 比較石墨系統與硫-鈀系統之直接電鍍速率 49 第五項 比較石墨系統與硫-鈀系統之銅沉積電位 56 硫-鈀導電性總結 58 第二節硫酸根對硫-鈀直接電鍍系統之影響 60 第一項 活化後不含硫酸之製程可進行直接電鍍 60 第二項 以IR分析以硫酸銅與焦磷酸銅鍍液浸泡前後的錫鈀膠體 62 第三項 硫酸對電鍍速率的影響 71 硫酸根對硫-鈀直接電鍍系統影響總結 73 第伍章 結論 74 第陸章 參考文獻 75 附錄一 注意事項 83 附錄二 使用藥品來源 85

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