我們透過CMOS-MEMS整合技術將電容式的MEMS震盪器結構與Phase-Looked Loop整合在同一顆晶片，本論文首次提出以鎖相迴路的輸出來驅動MEMS震盪器結構，藉由鎖相迴路相位對相位的追蹤，可直接在鎖相迴路的輸出端讀出震盪器的震動頻率。再者，我們另外在MEMS震盪器結構上做oxide或parylene的沉積，其質量的變化造成感測結構的頻率變化，進而在鎖相迴路的輸出端得到結果，以達成質量感測的目的。

在鎖相迴路方面，我們是以全類比式的設計做為此次的研究架構，主要是由相位偵測器(Phase Detector)、壓控震盪器(VCO)以及迴路濾波器(Loop Filter)所組成，內容包含了穩定度的分析，迴路的模擬以及量測等等。

而在MEMS結構震盪器方面，我們總共設計了四種不同的結構，每種結構各16個cell，總共8 x 8個感測器，設計的震動頻率分別為228kHz、449kHz、614kHz以及796kHz，感測度分別為3.5 Hz/pg、8.67 Hz/pg、17 Hz/pg以及24.42 Hz/pg，結構的面積則大約為100µm x 30µm，其內容包含了MEMS震盪器結構的震盪頻率、位移、感測電容值以及感測度的模擬與量測，也針對一些遇到的問題進行了分析與討論。

最後，在質量感測部份我們選用了parylene做為沉積的質量塊，主要的原因他能在室溫下進行沉積，對於研究來說是較為方便的，我們也實際量測到了質量的變化所造成的頻率變化，達成了質量感測的目的。

Capacitive MEMS oscillator structure and Phase-Looked Loop are integrated in the same chip through the CMOS-MEMS integration technology. This work is the first proposed to use the PLL output to drive the MEMS oscillator structure. By deposition of oxide or parylene on MEMS oscillator structures, it will change the structure frequency caused by the change of mass, and thus it shows the result in the output of the phase-locked loop to achieve the purpose of mass sensing.

In the phase-locked loop, we use a full analog design in this work, which mainly contains a phase detector, a voltage-controlled oscillator and a loop filter. The thesis includes stability analysis, circuit simulation and measurement.

In the MEMS oscillator, we design four different structures, with each having a 4×4 array on the chip to form a 8×8 array. The resonant frequencies are 228 kHz, 449 kHz, 614 kHz and 796 kHz, and the simulated sensitivities are 3.5 Hz/pg, 8.67 Hz/pg, 17 Hz/pg and 24.42 Hz/pg. The area of the structure is 100μm×30μm. This thesis includes the simulation and measurement of the resonant frequency, displacement, capacitance and sensitivity of the MEMS structure. And we also analyze and discuss the problems we have encountered.

Finally, in the part of mass sensing, we choose Parylene as the material for deposition. The main reason is that it can be deposited at room temperature, and it is more convenient for the study. We also achieved the purpose of mass sensing by measuring the change of frequency by the change of mass.

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