本實驗，利用X光光電子能譜儀進行鋁合金樣品表面的分析，以了解曝水過後的鋁合金樣品經同步輻射光照射後其氧化層或化合物的變化情形。在實驗系統方面，加裝了氣導阻塊以降低曝光分析腔水氣之背景值。在光束引出管部份加偏壓以控制ESD背景值，但其效果並不明顯。X光光電子能譜之實驗結果發現，曝水後，其表面以Al(OH)3為主，當照光時，則形成Al2O3與H2O，其反應反程式為2Al(OH)3(s)-->Al2O3(s)+3H2O(g)。從XPS之分析結果亦再次證實，同步輻射光對表面的C、F污染物具有清理作用。

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