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研究生： 張新安
Hsin-An Chang
論文名稱： 應用於光學切換器之微型雙穩態機構設計
Design of a Bistable Compliant Micro-Mechanism Applied to Optical Switch
指導教授： 宋震國 教授
Prof. Cheng-Kuo Sung
口試委員:
學位類別： 碩士
Master
系所名稱： 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年： 2001
畢業學年度： 89
語文別： 英文
論文頁數： 76
中文關鍵詞： 雙穩態 、微撓性機構 、光學切換器
外文關鍵詞： Bistable, Compliant Micro-Mechansim, Optcial Switch
相關次數： 點閱：3  下載：0 
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    • 本論文中，將設計一組完全撓性機構使其具有雙穩態的效果，此機構可同時具有撓性機構與雙穩態元件的優點。本論文提出雙穩態撓性機構的設計方法，經由運動分析、應變能分析以及應力分析，透過參數設計與電腦模擬，設計一組雙穩態撓性機構。
    除設計撓性機構外，本論文也提出雙穩態撓性機構的應用，包括微繼電器(Micro relay)、雙穩態進給元件(Bistable feeding device)與微光學切換器(Micro optical switch)。其中，微繼電器是用於切換電流是否導通；雙穩態進給元件是透過與黃建誌同學的合作，利用抓爬式致動器(SDA)驅動雙穩態撓性機構；微光學切換器則結合了雙穩態進給元件與Lin等人設計的光學切換器。

    本論文設計的所有元件都是利用MUMPsTM製作完成。透過實驗測試與觀察，了解雙穩態撓性機構與雙穩態進給元件的功能與原先預期的結果很類似。

    This thesis proposes the design method for fully compliant bistable micro mechanisms. This class of mechanisms is constructed completely by elastic hinges and has two stationary locations. Therefore, it may possess the advantages of both the compliant mechanism and the bistable device because it can avoid the drawbacks caused by rigid joints and require no external power to keep it in position except switching between the two stable positions. Under the constraint of overstress resulted failure, the total strain energy of the bistable compliant mechanism is derived by summing up the strain energy stored in each elastic member.
    In addition, this thesis also proposes several applications that contain bistable compliant micro mechanisms, including a micro relay, a bistable feeding device and an improved optical switch. Among them, the micro relay is designed for conducting the current; the bistable feeding device is composed of a bistable compliant mechanism and an electrostatic actuator named SDA (Scratch drive actuator) through the cooperation with my partner, C. C. Huang; and the optical switch, designed for the optical networks, integrates with the bistable compliant micro mechanism with the structure proposed by Lin et. al.

    The micro devices are implemented by a surface-micromachining process with three layers of polysilicon, known as MUMPsTM. In addition, an experimental setup is constructed to test the individual micro devices in order to demonstrate the ideas proposed in this research. From the experimental results, the compliant bistable micro mechanism and the bistable feeding device operate similarly as expected.

    CHAPTER 1 INTRODUCTION 1 1.1 Background 1 1.2 Literature review 3 1.2.1 Bistable micro-devices 3 1.2.2 Compliant mechanism 6 1.3 Contents of this research 7 CHAPTER 2 THEORY AND DESIGN OF BISTABLE COMPLIANT MECHANISMS 10 2.1 Theory and formulation of the bistable compliant mechanism 10 2.1.1 Physical model of the bistable compliant mechanism 10 2.1.2 Analysis of motion 12 2.1.3 Analysis of strain energy 13 2.1.4 Analysis of stress 15 2.2 Design of the bistable compliant mechanism 19 CHAPTER 3 DESIGN AND FABRICATION OF MICRO DEVICES WITH BISTABLE FUNCTION 25 3.1 Introduction to MUMPs™ process 25 3.2 Applications of the bistable compliant mechanism 34 3.2.1 Micro relay 34 3.2.2 Bistable feeding device 35 3.2.3 Optical switch 37 3.3 Fabrication of the micro devices 40 3.3.1 Fabrication using MUMPs™ process 41 3.3.2 Post-process 47 CHAPTER 4 EXPERIMENTS ON DEVICES WITH BISTABLE FUNCTION 49 4.1 Experimental instruments 49 4.2 Experiments on the bistable compliant mechanism 52 4.2.1 Experimental method 52 4.2.2 Experimental results 53 4.2.3 Discussion 55 4.3 Experiments on the micro relay 56 4.3.1 Experimental method 57 4.3.2 Experimental results 57 4.3.3 Discussion 57 4.4 Experiments on the bistable feeding device 58 4.4.1 Experimental method 59 4.4.2 Experimental results 59 4.4.3 Discussion 61 4.5 Experiments on the optical switch 64 4.5.1 Experimental method 64 4.5.2 Experimental results 65 4.5.3 Discussion 66 CHAPTER 5 CONCLUSIONS AND FUTURE WORK 67 5.1 Conclusions 67 5.2 Future work 68

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