電子元件不斷的縮小，成本也不斷的降低，在這個過程中，縮小
化的技術遇到了瓶頸，而使部分科學家轉為研究奈米級的材料。奈米
碳管是近來最熱門的奈米材料之一，具有許多優越的性質，值得我們
進一步去探討與研究，其中我們有興趣的是奈米碳管結構與電學性質
的關係。
本實驗利用傳統的光學微影與電子束微影製程製做出奈米碳管
元件的電極，而奈米碳管則用化學處理的方式沈積在基板上或是利用
溼式催化劑配合化學氣相沈積法直接長在基板上，配合試片劈裂的製
程在基板邊緣做出奈米碳管的元件結構，並結合微機電常用的側蝕刻
技術，使奈米碳管懸空在基板邊緣，這個技術使我們可以量測特定奈
米碳管的電學性質又利用穿透式電子顯微鏡量這根測奈米碳管的的
結構參數，這是傳統製程無法達到的。
這個技術的想法很直接，但是製程的步驟很多道，所以必須小心
謹慎。有了這個技術以後，我們也期許將來能夠把這個技術應用在別
的奈米材料上，或是配合穿透式電子顯微鏡更深入研究奈米碳管結構
與其它物理性質的關係。

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